Radiation source having debris control
De Jong, Arjen Teake, Kleemans, Niek Antonius Jacobus Maria, Verbraak, Harald Ernest, Beijsens, Rolf Theodorus Nicolaas, Van Asten, Nicolaas Antonius Allegondus Johannes, Seroglazov, Pavel, Feenstra, Kornelis Frits, Jilisen, Reinier Theodorus Martinus, Nikipelov, Andrey
Year of Publication 10.03.2020
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Year of Publication 10.03.2020
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RADIATION SOURCE
KLEEMANS Niek Antonius Jacobus Maria, BEIJSENS Rolf Theodorus Nicolaas, VERBRAAK Harald Ernest, FEENSTRA Kornelis Frits, SEROGLAZOV Pavel, NIKIPELOV Andrey, VAN ASTEN Nicolaas Antonius Allegondus Johannes, DE JONG Arjen Teake, JILISEN Reinier Theodorus Martinus
Year of Publication 22.09.2016
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Year of Publication 22.09.2016
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RADIATION SOURCE
JILISEN, REINIER, THEODORUS, MARTINUS, KLEEMANS, NIEK, ANTONIUS, JACOBUS, MARIA, VERBRAAK, HARALD, ERNEST, DE JONG, ARJEN, TEAKE, FEENSTRA, KORNELIS, FRITS, NIKIPELOV, ANDREY, SEROGLAZOV, PAVEL, VAN ASTEN, NICOLAAS, ANTONIUS, ALLEGONDUS, JOHANNES, BEIJSENS, ROLF, THEODORUS, NICOLAAS
Year of Publication 21.05.2015
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Year of Publication 21.05.2015
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METHOD AND DEVICE FOR GENERATING EUV RADIATION OR SOFT X-RAYS WITH ENHANCED EFFICIENCY
VERBRAAK HARALD ERNEST, KREPPER FELIX ALEXANDER, JONKERS JEROEN, NEFF JAKOB WILLI
Year of Publication 13.10.2011
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Year of Publication 13.10.2011
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Method and device for generating euv radiation or soft x-rays with enhanced efficiency
NEFF, JAKOB WILLI, VERBRAAK, HARALD ERNEST, JONKERS, JEROEN, KUEPPER, FELIX ALEXANDER
Year of Publication 01.02.2015
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Year of Publication 01.02.2015
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Method and device for generating EUV radiation or soft X-rays with enhanced efficiency
NEFF, JAKOB WILLI, VERBRAAK, HARALD ERNEST, JONKERS, JEROEN, KUEPPER, FELIX ALEXANDER
Year of Publication 16.08.2010
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Year of Publication 16.08.2010
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