HIGH BIAS DEPOSITION OF HIGH QUALITY GAPFILL
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Year of Publication 03.11.2023
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Year of Publication 03.11.2023
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Poly-adamantane as precursor for low temperature chemical vapor deposition of nanocrystalline diamond films
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Published in Diamond and related materials (01.12.2022)
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C DC/RF PULSED PLASMA DC/RF DEPOSITION OF HIGH QUALITY C FILMS FOR PATTERNING
VENKATASUBRAMANIAN ESWARANAND, YANG YANG, KOSHIZAWA TAKEHITO, MANNA PRAMIT, RAMASWAMY KARTIK, MALLICK ABHIJIT BASU
Year of Publication 27.06.2024
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Year of Publication 27.06.2024
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금속 도핑된 탄소 하드마스크들
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Year of Publication 26.01.2024
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Year of Publication 26.01.2024
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다이아몬드 막 증착을 위한 기상 전구체 시딩
SAHMUGANATHAN VICKNESH, VENKATASUBRAMANIAN ESWARANAND, GU JITENG, LOH KIAN PING, SUDIJONO JOHN, TAN SZE CHIEH, MALLICK ABHIJIT BASU
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Year of Publication 06.08.2024
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패터닝 애플리케이션들을 위한 고밀도 탄소 막들
VENKATASUBRAMANIAN ESWARANAND, GOTTHEIM SAMUEL E, MALLICK ABHIJIT B, MANNA PRAMIT
Year of Publication 07.06.2021
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Year of Publication 07.06.2021
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저온 고품질 유전체 막들
VENKATASUBRAMANIAN ESWARANAND, GOTTHEIM SAMUEL E, MANNA PRAMIT, MALLICK ABHIJIT BASU
Year of Publication 24.02.2021
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Year of Publication 24.02.2021
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박막의 응력을 완화시키기 위한 인-시튜 고전력 주입
VENKATASUBRAMANIAN ESWARANAND, MALLICK ABHIJIT B, GANDIKOTA SRINIVAS, MANNA PRAMIT
Year of Publication 02.02.2021
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Year of Publication 02.02.2021
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고품질 갭필의 고 바이어스 증착
GOTTHEIM SAMUEL E, VENKATASUBRAMANIAN ESWARANAND, MANNA PRAMIT, MALLICK ABHIJIT BASU
Year of Publication 25.01.2021
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Year of Publication 25.01.2021
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Characterization of film materials in wafer processing technology development by XPS
Saheli, Ghazal, Liu, Wei, Lazik, Christopher, Uritsky, Yuri, Bevan, Malcolm, Tang, Wei, Ma, Paul, Venkatasubramanian, Eswaranand, Bobek, Sarah, Kulshreshtha, Prashant, Brundle, C.R.
Published in Journal of electron spectroscopy and related phenomena (01.02.2019)
Published in Journal of electron spectroscopy and related phenomena (01.02.2019)
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하드마스크 적용들을 위한 붕소 도핑 텅스텐 탄화물
VENKATASUBRAMANIAN ESWARANAND, KOSHIZAWA TAKEHITO, SINGHA ROY SUSMIT, MALLICK ABHIJIT BASU
Year of Publication 11.09.2019
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Year of Publication 11.09.2019
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회전식 자기 하우징을 이용하는 튜닝가능 균일성 제어
GOTTHEIM SAMUEL E, VENKATASUBRAMANIAN ESWARANAND, HAYWOOD EDWARD, MALLICK ABHIJIT B, GARNER STEPHEN C, FRANKLIN TIMOTHY JOSEPH, MANNA PRAMIT
Year of Publication 14.04.2022
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Year of Publication 14.04.2022
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기판 프로세싱 챔버
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Year of Publication 03.01.2022
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Year of Publication 03.01.2022
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패터닝을 위한 고품질 C 막들의 펄스형 플라즈마(DC/RF) 증착
VENKATASUBRAMANIAN ESWARANAND, YANG YANG, KOSHIZAWA TAKEHITO, MANNA PRAMIT, RAMASWAMY KARTIK, MALLICK ABHIJIT BASU
Year of Publication 15.12.2020
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Year of Publication 15.12.2020
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패터닝 애플리케이션들을 위한 탄소 하드 마스크들 및 이와 관련된 방법들
VENKATASUBRAMANIAN ESWARANAND, YANG YANG, KOSHIZAWA TAKEHITO, MANNA PRAMIT, RAMASWAMY KARTIK, MALLICK ABHIJIT BASU
Year of Publication 18.11.2020
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Year of Publication 18.11.2020
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자기 하우징 시스템들
GOTTHEIM SAMUEL E, VENKATASUBRAMANIAN ESWARANAND, HAYWOOD EDWARD, GARNER STEPHEN C, GANDIKOTA SRINIVAS, FRANKLIN TIMOTHY JOSEPH, GUNG TZA JING, MANNA PRAMIT
Year of Publication 16.06.2021
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Year of Publication 16.06.2021
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플라즈마 결합 재료들을 최적화하는 것에 의한 막 특성들의 조절
FRANKLIN TIMOTHY J, VENKATASUBRAMANIAN ESWARANAND, GOTTHEIM SAMUEL E, MALLICK ABHIJIT B, FISCHBACH ADAM, HAYWOOD EDWARD L, MANNA PRAMIT, CHUC KIEN N
Year of Publication 24.03.2022
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Year of Publication 24.03.2022
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