N EPI LOW TEMPERATRUE N-TYPE CONTACT EPI FORMATION
VELLAIKAL MANOJ, BREIL NICOLAS, WANG ANCHUAN, LEE BYEONG CHAN, COGORNO MATTHEW
Year of Publication 05.10.2023
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Year of Publication 05.10.2023
Patent
통합 에피택시 및 사전 세정 시스템
VELLAIKAL MANOJ, HUANG YI CHIAU, LEE SONGJAE, CHOPRA SAURABH, DAVEY ERIC, WU CHEN YING
Year of Publication 16.08.2023
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Year of Publication 16.08.2023
Patent
세정 방법
OLSEN CHRISTOPHER S, VELLAIKAL MANOJ, HSIEH PING HAN, KUO TENG FANG, STONE PETER
Year of Publication 03.05.2018
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Year of Publication 03.05.2018
Patent
METHODS AND APPARATUS FOR CONFORMAL DOPING
VELLAIKAL MANOJ, HILKENE MARTIN A, SANTHANAM KARTIK, LEE MARK R, PORSHNEV PETER I, SCOTNEY CASTLE MATTHEW D
Year of Publication 03.02.2014
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Year of Publication 03.02.2014
Patent
ENHANCED SCAVENGING OF RESIDUAL FLUORINE RADICALS USING SILICON COATING ON PROCESS CHAMBER WALLS
LEE, DONG HYUNG, VELLAIKAL MANOJ, PORSHNEV PETER, CHOI, DONG WON, POON TZE, FOAD MAJEED
Year of Publication 05.06.2012
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Year of Publication 05.06.2012
Patent
INTEGRATED EPITAXY AND PRECLEAN SYSTEM
LEE, Songjae, CHOPRA, Saurabh, HUANG, Yi-Chiau, VELLAIKAL, Manoj, WU, Chen-Ying, DAVEY, Eric
Year of Publication 10.04.2024
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Year of Publication 10.04.2024
Patent
A shallow and deep trench isolation process module for RF BiCMOS
FORSBERG, Markus, JOHANSSON, Ted, WEI LIU, VELLAIKAL, Manoj
Published in Journal of the Electrochemical Society (2004)
Published in Journal of the Electrochemical Society (2004)
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Journal Article
GAPFILL EXTENSION OF HDP-CVD INTEGRATED PROCESS MODULATION SIO2 PROCESS
VELLAIKAL MANOJ, BLOKING JASON THOMAS, LEE YOUNG S, MUNGEKAR HEMANT P, WANG ANCHUAN, JEON, JIN HO
Year of Publication 27.04.2010
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Year of Publication 27.04.2010
Patent
LOW TEMPERATURE N-TYPE CONTACT EPI FORMATION
Wang, Anchuan, Cogorno, Matthew, Vellaikal, Manoj, Lee, Byeong Chan, Breil, Nicolas
Year of Publication 28.09.2023
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Year of Publication 28.09.2023
Patent
LOW TEMPERATURE N-TYPE CONTACT EPI FORMATION
COGORNO, Matthew, WANG, Anchuan, VELLAIKAL, Manoj, BREIL, Nicolas, LEE, Byeong Chan
Year of Publication 28.09.2023
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Year of Publication 28.09.2023
Patent
Development of high efficiency mono-crystalline silicon solar cells: Optimization of rear local contacts formation on dielectrically passivated surfaces
Wijekoon, Kapila, Mungekar, H., Stewart, M., Kumar, P., Franklin, J., Agrawal, M., Rapolu, K., Fei Yan, Yi Zheng, Chan, Andie, Vellaikal, M., Xuesong Lu, Kochhar, D., Lin Zhang, Tanner, D., Dabeer, V., Ponnekanti, H.
Published in 2012 38th IEEE Photovoltaic Specialists Conference (01.06.2012)
Published in 2012 38th IEEE Photovoltaic Specialists Conference (01.06.2012)
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Conference Proceeding
PLASMA IMMERSION ION IMPLANTATION PROCESS WITH CHAMBER SEASONING AND SEASONING LAYER PLASMA DISCHARGING FOR WAFER DECHUCKING
VELLAIKAL MANOJ, HILKENE MARTIN A, SANTHANAM KARTIK, FOAD MAJEED A, TA YEN B, LAI CANFENG, PORSHNEV PETER I, SCOTNEY CASTLE MATTHEW D
Year of Publication 04.01.2011
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Year of Publication 04.01.2011
Patent
INTEGRATED EPITAXY AND PRECLEAN SYSTEM
LEE, Songjae, CHOPRA, Saurabh, HUANG, Yi-Chiau, VELLAIKAL, Manoj, WU, Chen-Ying, DAVEY, Eric
Year of Publication 01.12.2022
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Year of Publication 01.12.2022
Patent
INTEGRATED EPITAXY AND PRECLEAN SYSTEM
Vellaikal, Manoj, Wu, Chen-Ying, Davey, Eric, HUANG, Yi-Chiau, Chopra, Saurabh, Lee, Songjae
Year of Publication 24.11.2022
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Year of Publication 24.11.2022
Patent
(Invited) Enabling Low Temperature and High Quality Epitaxial Films for Current and Future Nodes
Hemkar, Manish, Sanchez, Errol, Mandrekar, Tushar, Chowdhury, Mohammad, Zhu, Zuoming, Olsen, Chris, Vellaikal, Manoj, Chu, Schubert
Published in Meeting abstracts (Electrochemical Society) (23.07.2018)
Published in Meeting abstracts (Electrochemical Society) (23.07.2018)
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Journal Article
Cleaning method
Vellaikal, Manoj, Stone, Peter, Olsen, Christopher S, Kuo, Teng-fang, Hsieh, Ping Han
Year of Publication 10.08.2021
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Year of Publication 10.08.2021
Patent
Low temperature N-type contact EPI formation
VELLAIKAL, MANOJ, WANG, ANCHUAN, BREIL, NICOLAS, LEE, BYEONGAN, COGORNO, MATTHEW
Year of Publication 01.01.2024
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Year of Publication 01.01.2024
Patent
Extending HDP for STI fill to 45nm with IPM
Anchuan Wang, Bloking, J., Linlin Wang, Vellaikal, M., Jin Ho Jeon, Lee, Y.S., Whitesell, H.S.
Published in 2007 International Symposium on Semiconductor Manufacturing (01.10.2007)
Published in 2007 International Symposium on Semiconductor Manufacturing (01.10.2007)
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Conference Proceeding