AES and USXES investigations of the phase transformation in the surface layers of V-Si/SiO 2/Si thin films structure stimulated by oxygen annealing
Domashevskaya, E.P., Yurakov, Yu.A., Veligura, G.A., Bocharov, S.A.
Published in Journal of electron spectroscopy and related phenomena (1995)
Published in Journal of electron spectroscopy and related phenomena (1995)
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Journal Article
AES and USXES investigations of the phase transformation in the surface layers of V-Si/SiO2/Si thin films structure stimulated by oxygen annealing
Domashevskaya, E.P., Yurakov, Yu.A., Veligura, G.A., Bocharov, S.A.
Published in Journal of electron spectroscopy and related phenomena (29.12.1995)
Published in Journal of electron spectroscopy and related phenomena (29.12.1995)
Get full text
Journal Article