Reactive multi-pulse HiPIMS deposition of oxygen-deficient TiOx thin films
Tiron, V., Velicu, I.-L., Dobromir, M., Demeter, A., Samoila, F., Ursu, C., Sirghi, L.
Published in Thin solid films (31.03.2016)
Published in Thin solid films (31.03.2016)
Get full text
Journal Article