Post-CMP Cleaning Solutions for the Removal of Organic Contaminants with Reduced Galvanic Corrosion at Copper/Cobalt Interface for Advanced Cu Interconnect Applications
Seo, Jihoon, Vegi, S. S. R. K. Hanup, Babu, S. V.
Published in ECS journal of solid state science and technology (2019)
Published in ECS journal of solid state science and technology (2019)
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Journal Article
Formation of Cobalt-BTA Complexes and Their Removal from Various Surfaces Relevant to Cobalt Interconnect Applications
Seo, Jihoon, Vegi, S. S. R. K. Hanup, Ranaweera, C. K., Baradanahalli, N. K., Han, Ja-Hyung, Koli, Dinesh, Babu, S. V.
Published in ECS journal of solid state science and technology (2019)
Published in ECS journal of solid state science and technology (2019)
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Journal Article
Storage Temperature Effects on the Slurry Health Parameters and SiO2 Removal Rates during Chemical Mechanical Polishing
Seo, Jihoon, Othman, Ali, Kim, Hong Jin, Devabhaktuni, Jainendra, Trivedi, Rahul, Penigalapati, Dinesh, Kulasingam, Thayalan, Hanup Vegi, S. S. R. K., Babu, S. V.
Published in ECS journal of solid state science and technology (01.10.2021)
Published in ECS journal of solid state science and technology (01.10.2021)
Get full text
Journal Article
Storage Temperature Effects on the Slurry Health Parameters and SiO 2 Removal Rates during Chemical Mechanical Polishing
Seo, Jihoon, Othman, Ali, Kim, Hong Jin, Devabhaktuni, Jainendra, Trivedi, Rahul, Penigalapati, Dinesh, Kulasingam, Thayalan, Hanup Vegi, S. S. R. K., Babu, S. V.
Published in ECS journal of solid state science and technology (01.10.2021)
Published in ECS journal of solid state science and technology (01.10.2021)
Get full text
Journal Article