A novel multisite silicon probe for high quality laminar neural recordings
Grand, László, Pongrácz, Anita, Vázsonyi, Éva, Márton, Gergely, Gubán, Dorottya, Fiáth, Richárd, Kerekes, Bálint Péter, Karmos, György, Ulbert, István, Battistig, Gábor
Published in Sensors and actuators. A. Physical. (01.03.2011)
Published in Sensors and actuators. A. Physical. (01.03.2011)
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Journal Article
Characterization of an Integrable Single-Crystalline 3-D Tactile Sensor
Vasarhelyi, G., Adam, M., Vazsonyi, E., Vizvary, Z., Kis, A., Barsony, I., Ducso, C.
Published in IEEE sensors journal (01.08.2006)
Published in IEEE sensors journal (01.08.2006)
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Journal Article
Effects of the elastic cover on tactile sensor arrays
Vasarhelyi, Gabor, Adam, Maria, Vazsonyi, Eva, Barsony, Istvan, Ducso, Csaba
Published in Sensors and actuators. A. Physical. (08.11.2006)
Published in Sensors and actuators. A. Physical. (08.11.2006)
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Journal Article
CMOS integrated tactile sensor array by porous Si bulk micromachining
Adam, Maria, Mohacsy, Tibor, Jonas, Peter, Ducso, Csaba, Vazsonyi, Eva, Barsony, Istvan
Published in Sensors and actuators. A. Physical. (10.03.2008)
Published in Sensors and actuators. A. Physical. (10.03.2008)
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Journal Article
MONOLITHICALLY INTEGRATED MONOCRYSTALLINE MICROMECHANICAL ELEMENTS
DUECSOE, CSABA, EROES, MAGDOLNA, ADAM, ANTALNE, MOHACSY, TIBOR, VAZSONYI, EVA, BARSONY, ISTVAN, PAYER, KAROLYNE
Year of Publication 25.11.2009
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Year of Publication 25.11.2009
Patent
MONOLITHICALLY INTEGRATED MONOCRYSTALLINE MICROMECHANICAL ELEMENTS
DUECSOE, CSABA, EROES, MAGDOLNA, ADAM, ANTALNE, MOHACSY, TIBOR, VAZSONYI, EVA, BARSONY, ISTVAN, PAYER, KAROLYNE
Year of Publication 25.02.2009
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Year of Publication 25.02.2009
Patent
METHOD FOR PRODUCING MICROMECHANICAL ELEMENTS CAN BE INTEGRATED INTO CMOS TECHNOLOGY, CARRYING MONOLITH SI AND MONOLITH SIO PRODUCED BY POROUS SI MICROMANUFACTURING PROCESS
VAZSONYI EVA, ADAM ANTALNE, DUECSOE CSABA, PAYER KAROLYNE, MOHACSY TIBOR, BARSONY ISTVAN, EROES MAGDOLNA
Year of Publication 28.05.2008
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Year of Publication 28.05.2008
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CMOS INTEGRATED PROCESS FOR FABRICATING MONOCRYSTALLINE SILICON MICROMECHANICAL ELEMENTS BY POROUS SILICON MICROMACHINING AND SENSOR CHIP COMPRISING SUCH ELEMENT
DUECSOE, CSABA, EROES, MAGDOLNA, ADAM, ANTALNE, MOHACSY, TIBOR, VAZSONYI, EVA, BARSONY, ISTVAN, PAYER, KAROLYNE
Year of Publication 10.04.2008
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Year of Publication 10.04.2008
Patent
CMOS INTEGRATED PROCESS FOR FABRICATING MONOCRYSTALLINE SILICON
DUECSOE, CSABA, EROES, MAGDOLNA, ADAM, ANTALNE, MOHACSY, TIBOR, VAZSONYI, EVA, BARSONY, ISTVAN, PAYER, KAROLYNE
Year of Publication 14.02.2008
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Year of Publication 14.02.2008
Patent
CMOS INTEGRATED PROCESS FOR FABRICATING MONOCRYSTALLINE SILICON
DUECSOE, CSABA, EROES, MAGDOLNA, ADAM, ANTALNE, MOHACSY, TIBOR, VAZSONYI, EVA, BARSONY, ISTVAN, PAYER, KAROLYNE
Year of Publication 21.12.2007
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Year of Publication 21.12.2007
Patent
METHOD OF MANUFACTURING EXTRACELLULAR ELECTRODES FROM SINGLE CRYSTAL SILICON SUBSTRATE HAVING PARALLEL SIDE WALLS AND ROUNDED EDGES, FORMED BY WET ETCH WHICH METHOD MAY BE INTEGRATED TO CMOS TECHNOLOGY
VAZSONYI EVA, BATTISTIG GABOR, GRAND LASZLO, ULBERT ISTVAN, PAYER KAROLYNE, KARMOS GYOERGY, PONGRACZ ANITA
Year of Publication 28.03.2012
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Year of Publication 28.03.2012
Patent