Effects of evolving surface morphology on yield during focused ion beam milling of carbon
Adams, D.P., Mayer, T.M., Vasile, M.J., Archuleta, K.
Published in Applied surface science (15.01.2006)
Published in Applied surface science (15.01.2006)
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Journal Article
Micromilling of metal alloys with focused ion beam–fabricated tools
Adams, David P., Vasile, Michael J., Benavides, Gilbert, Campbell, Ann N.
Published in Precision engineering (01.04.2001)
Published in Precision engineering (01.04.2001)
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Journal Article
Optical Interferometer Microscope for Monitoring and Control of Focused Ion Beam Processes
Adams, DP, Sinclair, MB, Mayer, TM, Vasile, MJ, Sweatt, WC
Published in Microscopy and microanalysis (01.08.2006)
Published in Microscopy and microanalysis (01.08.2006)
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Journal Article
Micrometer-scale machining: tool fabrication and initial results
Vasile, Michael J., Friedrich, Craig R., Kikkeri, Bharath, McElhannon, Rob
Published in Precision engineering (01.10.1996)
Published in Precision engineering (01.10.1996)
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Journal Article
The fabrication of nonplanar spin-on glass microstructures
Liu, R.H., Vasile, M.J., Beebe, D.J.
Published in Journal of microelectromechanical systems (01.06.1999)
Published in Journal of microelectromechanical systems (01.06.1999)
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Journal Article
Probe characterization for scanning probe metrology
Grigg, D.A., Russell, P.E., Griffith, J.E., Vasile, M.J., Fitzgerald, E.A.
Published in Ultramicroscopy (01.07.1992)
Published in Ultramicroscopy (01.07.1992)
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Journal Article
Conference Proceeding
Modeling a micromanufactured open recess-tip oxygen microelectrode
McGuyer, J.C., Vasile, M.J., Schubert, R.W.
Published in Proceedings of the 1997 16 Southern Biomedical Engineering Conference (1997)
Published in Proceedings of the 1997 16 Southern Biomedical Engineering Conference (1997)
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Conference Proceeding
Vacuum annealing effects on the surface stoichiometry of InGaAsP
YEH, J. L, LIU, S. Z, VASILE, M. J, SCHWARTZ, B
Published in Journal of the Electrochemical Society (01.04.1990)
Published in Journal of the Electrochemical Society (01.04.1990)
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Journal Article
Carbon 1s core level shifts after annealing the (100) surface of InGaAsP, InP and GaAs
YEH, J. L, LIU, S. Z, SCHWARTZ, B, VASILE, M. J
Published in Journal of the Electrochemical Society (01.03.1989)
Published in Journal of the Electrochemical Society (01.03.1989)
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Journal Article