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Published in ECS journal of solid state science and technology (01.01.2015)
Published in ECS journal of solid state science and technology (01.01.2015)
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Electrical Enhancement and Higher-K Engineering in Ultra-Thin Atomic Layer Deposited Hf1-xAlxOy Films
Tapily, K., Consiglio, S., Clark, R. D., Vasi , R., Wajda, C. S., Jordan-Sweet, J., Leusink, G. J., Diebold, A. C.
Published in ECS journal of solid state science and technology (03.11.2014)
Published in ECS journal of solid state science and technology (03.11.2014)
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