On-axis radio frequency magnetron sputtering of stoichiometric BaTiO3 target: Localized re-sputtering and substrate etching during thin film growth
Vargas, F.A., Nouar, R., Said Bacar, Z., Higuera, B., Porter, R., Sarkissian, A., Thomas, R., Ruediger, A.
Published in Thin solid films (01.12.2015)
Published in Thin solid films (01.12.2015)
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