Cradle-to-gate Life Cycle Assessment of CMOS Logic Technologies
Boakes, L., Garcia Bardon, M., Schellekens, V., Liu, I-Y., Vanhouche, B., Mirabelli, G., Sebaai, F., Van Winckel, L., Gallagher, E., Rolin, C., Ragnarsson, L.-A.
Published in 2023 International Electron Devices Meeting (IEDM) (09.12.2023)
Published in 2023 International Electron Devices Meeting (IEDM) (09.12.2023)
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