RADIATION SOURCE
EURLINGS MARKUS FRANCISCUS ANTONIUS, KLEEMANS NIEK ANTONIUS JACOBUS MARIA, PHAM TIEN NANG, NOORDMAN OSCAR FRANCISCUS JOZEPHUS, WANG JIUN CHENG, VAN DIJSSELDONK ANTONIUS JOHANNES JOSEPHUS, VAN SCHOOT JAN BERNARD PLECHELMUS, HOFSTRA RAMON MARK, ZHANG KEVIN WEIMIN
Year of Publication 28.09.2016
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Year of Publication 28.09.2016
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RADIATION SYSTEM, RADIATION COLLECTOR, RADIATION BEAM CONDITIONING SYSTEM, SPECTRAL PURITY FILTER FOR A RADIATION SYSTEM AND METHOD OF FORMING A SPECTRAL PURITY FILTER
LOOPSTRA ERIK ROELOF, BANINE VADIM YEVGENYEVICH, SWINKELS GERARDUS HUBERTUS PETRUS MARIA, VAN DIJSSELDONK ANTONIUS JOHANNES JOSEPHUS, VAN SCHOOT JAN BERNARD PLECHELMUS, DE BOEIJ WILHELMUS PETRUS
Year of Publication 16.02.2011
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Year of Publication 16.02.2011
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LITHOGRAPHY PROJECTION DEVICE AND MEASURING SYSTEM TO ALLOW RADIATION TO CHARGE ENTIRE PUPIL OF PROJECTION LENS AND TO MINIMIZE EFFECT OF WAVE FRONT ABERRATIONS
MOORS JOHANNES HUBERTUS JOSEPHINA, BASELMANS JOHANNES JACOBUS MATHEUS, VAN DER LAAN HANS, VAN DIJSSELDONK ANTONIUS JOHANNES JOSEPHUS, LEENDERS MARTINUS HENDRIKUS ANTONIUS
Year of Publication 09.04.2004
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Year of Publication 09.04.2004
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Lithographic apparatus, spectral purity filter and device manufacturing method
Swinkels Gerardus Hubertus Petrus Maria, Van Dijsseldonk Antonius Johannes Josephus Van Dijsseldonk, Loopstra Erik Roelof, De Boeij Wilhelmus Petrus, Moors Johannes Hubertus Josephina, Banine Vadim Yevgenyevich, Van Schoot Jan Bernard Plechelmus, Yakunin Andrei Mikhailovich
Year of Publication 14.03.2017
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Year of Publication 14.03.2017
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LITHOGRAPHIC PROJECTION APPARATUS AND DEVICE MANUFACTURING METHOD
LOOPSTRA ERIK ROELOF, BANINE VADIM YEVGENYEVICH, NOORDMAN OSCAR FRANSISCUS JOZE, RENKENS MICHAEL JOZEFA MATHIJS, VAN DIJSSELDONK ANTONIUS JOHANNES JOSEPHUS, BENSCHOP JOZEF PETRUS HENRICUS, MOORS JOHANNES HUBERTUS JOSEPH
Year of Publication 18.01.2002
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Year of Publication 18.01.2002
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Lithographic projection apparatus and device manufacturing method
NOORDMAN OSCAR FRANSISCUS JOZEPHUS, LOOPSTRA ERIK ROELOF, BANINE VADIM YEVGENYEVICH, RENKENS MICHAEL JOZEFA MATHIJS, MOORS JOHANNES HUBERTUS JOSEPHINA, VAN DIJSSELDONK ANTONIUS JOHANNES JOSEPHUS VAN, BENSCHOP JOZEF PETRUS HENRICUS
Year of Publication 14.02.2002
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Year of Publication 14.02.2002
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Lithographic apparatus, spectral purity filter and device manufacturing method
Yakunin, Andrei Mikhailovich, Swinkels, Gerardus Hubertus Petrus Maria, Van Dijsseldonk, Antonius Johannes Josephus, Moors, Johannes Hubertus Josephina, Van Schoot, Jan Bernard Plechelmus, Banine, Vadim Yevgenyevich, De Boeij, Wilhelmus Petrus, Loopstra, Erik Roelof
Year of Publication 19.06.2018
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Year of Publication 19.06.2018
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Radiation source
Van Dijsseldonk Antonius Johannes Josephus, Hofstra Ramon Mark, Kleemans Niek Antonius Jacobus Maria, Eurlings Markus Franciscus Antonius, Wang Jiun-Cheng, Zhang Kevin Weimin, Noordman Oscar Franciscus Jozephus, Van Schoot Jan Bernard Plechelmus, Pham Tien Nang
Year of Publication 05.12.2017
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Year of Publication 05.12.2017
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