FLUID HANDLING STRUCTURE FOR LITHOGRAPHIC APPARATUS
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Year of Publication 26.01.2021
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Year of Publication 26.01.2021
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리소그래피 장치를 위한 유체 처리 구조물
TEUNISSEN MARCEL MARIA CORNELIUS FRANCISCUS, VAN VLIET EVERT, KEUKENS FLOOR LODEWIJK, TEN KATE NICOLAAS, ROPS CORNELIUS MARIA, CUYPERS KOEN, TANASA GHEORGHE, VAN DEN EIJNDEN PEPIJN, VAN ERVE JANTIEN LAURA, FRENCKEN MARK JOHANNES HERMANUS, GATTOBIGIO GIOVANNI LUCA, POLET THEODORUS WILHELMUS, BUDDENBERG HAROLD SEBASTIAAN, CORTIE ROGIER HENDRIKUS MAGDALENA
Year of Publication 24.04.2019
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Year of Publication 24.04.2019
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LITHOGRAPHIC APPARATUS METHOD OF TRANSFERRING A SUBSTRATE AND DEVICE MANUFACTURING METHOD
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Year of Publication 10.02.2017
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Year of Publication 10.02.2017
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Fluid handling structure for lithographic apparatus
Tanasa, Gheorghe, Rops, Cornelius Maria, Cuypers, Koen, Keukens, Floor Lodewijk, Frencken, Mark Johannes Hermanus, Gattobigio, Giovanni Luca, Cortie, Rogier Hendrikus Magdalena, Ten Kate, Nicolaas, Van Vliet, Evert, Teunissen, Marcel Maria Cornelius Franciscus, Buddenberg, Harold Sebastiaan, Polet, Theodorus Wilhelmus, Van Erve, Jantien Laura, Van Den Eijnden, Pepijn
Year of Publication 02.01.2024
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Year of Publication 02.01.2024
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FLUID HANDLING STRUCTURE FOR LITHOGRAPHIC APPARATUS
CORTIE, Rogier Hendrikus Magdalena, POLET, Theodorus Wilhelmus, TEUNISSEN, Marcel Maria Cornelius Franciscus, TEN KATE, Nicolaas, CUYPERS, Koen, KEUKENS, Floor Lodewijk, FRENCKEN, Mark Johannes Hermanus, BUDDENBERG, Harold Sebastiaan, TANASA, Gheorghe, VAN DEN EIJNDEN, Pepijn, GATTOBIGIO, Giovanni Luca, VAN ERVE, Jantien Laura, VAN VLIET, Evert, ROPS, Cornelius Maria
Year of Publication 23.02.2023
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Year of Publication 23.02.2023
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FLUID HANDLING STRUCTURE FOR LITHOGRAPHIC APPARATUS
CORTIE, Rogier Hendrikus Magdalena, POLET, Theodorus Wilhelmus, TEUNISSEN, Marcel Maria Cornelius Franciscus, TEN KATE, Nicolaas, CUYPERS, Koen, KEUKENS, Floor Lodewijk, FRENCKEN, Mark Johannes Hermanus, BUDDENBERG, Harold Sebastiaan, TANASA, Gheorghe, VAN DEN EIJNDEN, Pepijn, GATTOBIGIO, Giovanni Luca, VAN ERVE, Jantien Laura, VAN VLIET, Evert, ROPS, Cornelius Maria
Year of Publication 05.10.2022
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Year of Publication 05.10.2022
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Fluid handling structure for lithographic apparatus
Tanasa, Gheorghe, Rops, Cornelius Maria, Cuypers, Koen, Keukens, Floor Lodewijk, Frencken, Mark Johannes Hermanus, Gattobigio, Giovanni Luca, Cortie, Rogier Hendrikus Magdalena, Ten Kate, Nicolaas, Van Vliet, Evert, Teunissen, Marcel Maria Cornelius Franciscus, Buddenberg, Harold Sebastiaan, Polet, Theodorus Wilhelmus, Van Erve, Jantien Laura, Van Den Eijnden, Pepijn
Year of Publication 27.09.2022
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Year of Publication 27.09.2022
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Lithographic apparatus, method of transferring a substrate and device manufacturing method
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Year of Publication 09.02.2021
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Year of Publication 09.02.2021
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FLUID HANDLING STRUCTURE FOR LITHOGRAPHIC APPARATUS
CORTIE, Rogier Hendrikus Magdalena, POLET, Theodorus Wilhelmus, TEUNISSEN, Marcel Maria Cornelius Franciscus, TEN KATE, Nicolaas, CUYPERS, Koen, KEUKENS, Floor Lodewijk, FRENCKEN, Mark Johannes Hermanus, BUDDENBERG, Harold Sebastiaan, TANASA, Gheorghe, VAN DEN EIJNDEN, Pepijn, GATTOBIGIO, Giovanni Luca, VAN ERVE, Jantien Laura, VAN VLIET, Evert, ROPS, Cornelius Maria
Year of Publication 26.08.2021
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Year of Publication 26.08.2021
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Fluid handling structure for lithographic apparatus
Tanasa, Gheorghe, Rops, Cornelius Maria, Cuypers, Koen, Keukens, Floor Lodewijk, Frencken, Mark Johannes Hermanus, Gattobigio, Giovanni Luca, Cortie, Rogier Hendrikus Magdalena, Ten Kate, Nicolaas, Van Vliet, Evert, Teunissen, Marcel Maria Cornelius Franciscus, Buddenberg, Harold Sebastiaan, Polet, Theodorus Wilhelmus, Van Erve, Jantien Laura, Van Den Eijnden, Pepijn
Year of Publication 08.06.2021
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Year of Publication 08.06.2021
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A DEVICE, APPARATUS, LITHOGRAPHIC DEVICE AND METHOD
JOHANNES MAESSEN, PEPIJN VAN DEN EIJNDEN, ROBIN BERNARDUS JOHANNES KOLDEWEIJ, CORNELIUS MARIA ROPS, ERIK HENRICUS EGIDIUS CATHARINA EUMMELEN, PETRUS MARTINUS GERARDUS JOHANNES ARTS, NUPUR SUBHEDAR
Year of Publication 09.04.2019
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Year of Publication 09.04.2019
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FLUID HANDLING STRUCTURE FOR LITHOGRAPHIC APPARATUS
POLET, Theodorus Wilhelmus, TEN KATE, Nicolaas, CUYPERS, Koen, TEUNISSEN, Marcel Maria Cornelius Franciscu, KEUKENS, Floor Lodewijk, FRENCKEN, Mark Johannes Hermanus, BUDDENBERG, Harold Sebastiaan, TANASA, Gheorghe, VAN DEN EIJNDEN, Pepijn, CORTIE, Rogier Hendrikus Magdalen, GATTOBIGIO, Giovanni Luca, VAN ERVE, Jantien Laura, VAN VLIET, Evert, ROPS, Cornelius Maria
Year of Publication 31.12.2020
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Year of Publication 31.12.2020
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LITHOGRAPHIC APPARATUS, METHOD OF TRANSFERRING A SUBSTRATE AND DEVICE MANUFACTURING METHOD
Fahrni, Francis, Alberti, Jozef Augustinus Maria, Olieslagers, Ruud, Rops, Cornelius Maria, Van Dongen, Paul, Van Der Ham, Ronald, Pieterse, Gerben, Van Den Eijnden, Pepijn, Willems, Bas, VAN BEUZEKOM, Aart Adrianus, Segers, Hubert Marie
Year of Publication 26.12.2019
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Year of Publication 26.12.2019
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Lithographic apparatus, method of transferring a substrate and device manufacturing method
Fahrni, Francis, Alberti, Jozef Augustinus Maria, Olieslagers, Ruud, Rops, Cornelius Maria, Van Dongen, Paul, Van Der Ham, Ronald, Van Beuzekom, Aart Adrianus, Pieterse, Gerben, Van Den Eijnden, Pepijn, Willems, Bas, Segers, Hubert Marie
Year of Publication 10.09.2019
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Year of Publication 10.09.2019
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FLUID HANDLING STRUCTURE FOR LITHOGRAPHIC APPARATUS
CORTIE, Rogier Hendrikus Magdalena, POLET, Theodorus Wilhelmus, TEUNISSEN, Marcel Maria Cornelius Franciscus, TEN KATE, Nicolaas, CUYPERS, Koen, KEUKENS, Floor Lodewijk, FRENCKEN, Mark Johannes Hermanus, BUDDENBERG, Harold Sebastiaan, TANASA, Gheorghe, VAN DEN EIJNDEN, Pepijn, GATTOBIGIO, Giovanni Luca, VAN ERVE, Jantien Laura, VAN VLIET, Evert, ROPS, Cornelius Maria
Year of Publication 17.07.2019
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Year of Publication 17.07.2019
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LITHOGRAPHIC APPARATUS, METHOD OF TRANSFERRING A SUBSTRATE AND DEVICE MANUFACTURING METHOD
FAHRNI, Francis, VAN DEN EIJNDEN, Pepijn, OLIESLAGERS, Ruud, ALBERTI, Jozef, Augustinus, Maria, SEGERS, Hubert, Marie, VAN BEUZEKOM, Aart, Adrianus, VAN DER HAM, Ronald, VAN DONGEN, Paul, PIETERSE, Gerben, WILLEMS, Bas, ROPS, Cornelius, Maria
Year of Publication 04.07.2018
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Year of Publication 04.07.2018
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LITHOGRAPHIC APPARATUS, METHOD OF TRANSFERRING A SUBSTRATE AND DEVICE MANUFACTURING METHOD
ALBERTI Jozef Augustinus Maria, VAN DER HAM Ronald, SEGERS Hubert Marie, FAHRNI Francis, OLIESLAGERS Ruud, VAN DONGEN Paul, WILLEMS Bas, PIETERSE Gerben, ROPS Cornelius Maria, VAN BEUZEKOM Aart Adrianus, VAN DEN EIJNDEN Pepijn
Year of Publication 20.04.2017
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Year of Publication 20.04.2017
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LITHOGRAPHIC APPARATUS, METHOD OF TRANSFERRING A SUBSTRATE AND DEVICE MANUFACTURING METHOD
FAHRNI, Francis, VAN DEN EIJNDEN, Pepijn, OLIESLAGERS, Ruud, ALBERTI, Jozef, Augustinus, Maria, SEGERS, Hubert, Marie, VAN BEUZEKOM, Aart, Adrianus, VAN DER HAM, Ronald, VAN DONGEN, Paul, PIETERSE, Gerben, WILLEMS, Bas, ROPS, Cornelius, Maria
Year of Publication 19.04.2017
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Year of Publication 19.04.2017
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FLUID HANDLING STRUCTURE FOR LITHOGRAPHIC APPARATUS
TEUNISSEN, Marcel, Maria, Cornelius, Franciscus, CORTIE, Rogier, Hendrikus, Magdalena, TEN KATE, Nicolaas, CUYPERS, Koen, BUDDENBERG, Harold, Sebastiaan, KEUKENS, Floor, Lodewijk, ROPS, Cornelius, Maria, VAN ERVE, Jantien, Laura, TANASA, Gheorghe, VAN DEN EIJNDEN, Pepijn, POLET, Theodorus, Wilhelmus, FRENCKEN, Mark, Johannes, Hermanus, GATTOBIGIO, Giovanni, Luca, VAN VLIET, Evert
Year of Publication 15.03.2018
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Year of Publication 15.03.2018
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FLUID HANDLING STRUCTURE FOR LITHOGRAPHIC APPARATUS
MARK JOHANNES HERMANUS FRENCKEN, THEODORUS WILHELMUS POLET, ROGIER HENDRIKUS MAGDALENA CORTIE, HAROLD SEBASTIAAN BUDDENBERG, EVERT VAN VLIET, GIOVANNI LUCA GATTOBIGIO, JANTIEN LAURA VAN ERVE, NICOLAAS TEN KATE, GHEORGHE TANASA, KOEN CUYPERS, PEPIJN VAN DEN EIJNDEN, FLOOR LODEWIJK KEUKENS, CORNELIUS MARIA ROPS, MARRCEL MARIA CORNELIUS FRANCISCUS TEUNISSEN
Year of Publication 15.03.2018
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Year of Publication 15.03.2018
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