GAS FLOW OPTIMIZATION IN RETICLE STAGE ENVIRONMENT
SINGH CHATTARBIR, WESTERLAKEN JAN STEVEN CHRISTIAAN, VAN DE VEN HENRICUS ANITA JOZEF WILHEMUS, WARD CHRISTOPHER CHARLES, VAN BOKHOVEN LAURENTIUS JOHANNES ADRIANUS, FONSECA JUNIOR JOSE NILTON, LOOPSTRA ERIK ROELOF, CUYPERS KOEN, VAN BOXTEL FRANK JOHANNES JACOBUS, SCHUSTER MARK JOSEF, VAN BALLEGOIJ ROBERTUS NICODEMUS JACOBUS, REMIE MARINUS JAN, DE ANDRADE OLIVEIRA MARCELO HENRIQUE, ONVLEE JOHANNES, BURBANK DANIEL NATHAN
Year of Publication 27.10.2015
Get full text
Year of Publication 27.10.2015
Patent
FLUID EXTRACTION SYSTEM, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
DE METSENAERE CHRISTOPHE, ROPS CORNELIUS MARIA, VAN BALLEGOIJ ROBERTUS NICODEMUS JACOBUS, VAN DE WINKEL JIMMY MATHEUS WILHELMUS, RIEPEN MICHEL, BERKVENS PAUL PETRUS JOANNES, KEMPER NICOLAAS RUDOLF, VERMEULEN MARCUS MARTINUS PETRUS ADRIANUS, VAN DEN HEUVEL MARTINUS WILHELMUS
Year of Publication 21.06.2010
Get full text
Year of Publication 21.06.2010
Patent
Gas flow optimization in reticle stage environment
Van Boxtel, Frank Johannes Jacobus, Schuster, Mark Josef, Fonseca Junior, José Nilton, Van De Ven, Henricus Anita Jozef Wilhemus, Burbank, Daniel Nathan, Onvlee, Johannes, Ward, Christopher Charles, Cuypers, Koen, Westerlaken, Jan Steven Christiaan, Singh, Chattarbir, Remie, Marinus Jan, De Andrade Oliveira, Marcelo Henrique, Loopstra, Erik Roelof, Van Ballegoij, Robertus Nicodemus Jacobus, Van Bokhoven, Laurentius Johannes Adrianus
Year of Publication 24.07.2018
Get full text
Year of Publication 24.07.2018
Patent
LITHOGRAPHIC APPARATUS AND METHOD
KERSSEMAKERS, SANDER, HOOGENDAM, CHRISTIAAN, ALEXANDER, SMEETS, BART, VAN BALLEGOIJ, ROBERTUS, NICODEMUS, JACOBUS, BUTLER, HANS, VAN BUSSEL, HUBERTUS, PETRUS, LEONARDUS, HENRICA, BASELMANS, JOHANNES, JACOBUS, MATHEUS
Year of Publication 30.12.2015
Get full text
Year of Publication 30.12.2015
Patent
Fluid extraction system, lithographic apparatus and device manufacturing method
DE METSENAERE CHRISTOPHE, ROPS CORNELIUS MARIA, VAN BALLEGOIJ ROBERTUS NICODEMUS JACOBUS, VAN DE WINKEL JIMMY MATHEUS WILHELMUS, RIEPEN MICHEL, BERKVENS PAUL PETRUS JOANNES, KEMPER NICOLAAS RUDOLF, VERMEULEN MARCUS MARTINUS PETRUS ADRIANUS, VAN DEN HEUVEL MARTINUS WILHELMUS
Year of Publication 15.12.2015
Get full text
Year of Publication 15.12.2015
Patent
Gas Flow Optimization in Reticle Stage Environment
SINGH CHATTARBIR, WESTERLAKEN JAN STEVEN CHRISTIAAN, VAN DE VEN HENRICUS ANITA JOZEF WILHEMUS, WARD CHRISTOPHER CHARLES, VAN BOKHOVEN LAURENTIUS JOHANNES ADRIANUS, LOOPSTRA ERIK ROELOF, CUYPERS KOEN, VAN BOXTEL FRANK JOHANNES JACOBUS, SCHUSTER MARK JOSEF, VAN BALLEGOIJ ROBERTUS NICODEMUS JACOBUS, REMIE MARINUS JAN, DE ANDRADE OLIVEIRA MARCELO HENRIQUE, ONVLEE JOHANNES, FONSECA JUNIOR JOSÉ NILTON, BURBANK DANIEL NATHAN
Year of Publication 10.12.2015
Get full text
Year of Publication 10.12.2015
Patent
FLUID EXTRACTION SYSTEM, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
DE METSENAERE CHRISTOPHE, ROPS CORNELIUS MARIA, VAN BALLEGOIJ ROBERTUS NICODEMUS JACOBUS, VAN DE WINKEL JIMMY MATHEUS WILHELMUS, RIEPEN MICHEL, BERKVENS PAUL PETRUS JOANNES, KEMPER NICOLAAS RUDOLF, VERMEULEN MARCUS MARTINUS PETRUS ADRIANUS, VAN DEN HEUVEL MARTINUS WILHELMUS
Year of Publication 09.10.2014
Get full text
Year of Publication 09.10.2014
Patent
GAS FLOW OPTIMIZATION IN RETICLE STAGE ENVIRONMENT
SINGH CHATTARBIR, WESTERLAKEN JAN STEVEN CHRISTIAAN, VAN DE VEN HENRICUS ANITA JOZEF WILHEMUS, WARD CHRISTOPHER CHARLES, VAN BOKHOVEN LAURENTIUS JOHANNES ADRIANUS, FONSECA JUNIOR JOSE NILTON, LOOPSTRA ERIK ROELOF, CUYPERS KOEN, VAN BOXTEL FRANK JOHANNES JACOBUS, SCHUSTER MARK JOSEF, VAN BALLEGOIJ ROBERTUS NICODEMUS JACOBUS, REMIE MARINUS JAN, DE ANDRADE OLIVEIRA MARCELO HENRIQUE, ONVLEE JOHANNES, BURBANK DANIEL NATHAN
Year of Publication 21.10.2015
Get full text
Year of Publication 21.10.2015
Patent
Fluid extraction system, lithographic apparatus and device manufacturing method
DE METSENAERE CHRISTOPHE, ROPS CORNELIUS MARIA, VAN BALLEGOIJ ROBERTUS NICODEMUS JACOBUS, VAN DE WINKEL JIMMY MATHEUS WILHELMUS, RIEPEN MICHEL, BERKVENS PAUL PETRUS JOANNES, KEMPER NICOLAAS RUDOLF, VERMEULEN MARCUS MARTINUS PETRUS ADRIANUS, VAN DEN HEUVEL MARTINUS WILHELMUS
Year of Publication 18.02.2014
Get full text
Year of Publication 18.02.2014
Patent
GAS FLOW OPTIMIZATION IN RETICLE STAGE ENVIRONMENT
BURBANK, DANIEL, NATHAN, DE ANDRADE OLIVEIRA, MARCELO HENRIQUE, WARD, CHRISTOPHER, CHARLES, LOOPSTRA, ERIK, ROELOF, VAN BOXTEL, FRANK, JOHANNES, JACOBUS, SINGH, CHATTARBIR, REMIE, MARINUS, JAN, ONVLEE, JOHANNES, VAN BALLEGOIJ, ROBERTUS, NICODEMUS, JACOBUS, FONSECA JUNIOR, JOSÉ NILTON, WESTERLAKEN, JAN, STEVEN, CHRISTIAAN, CUYPERS, KOEN, SCHUSTER, MARK, JOSEF, VAN BOKHOVEN, LAURENTIUS, JOHANNES, ADRIANUS, VAN DE VEN, HENRICUS ANITA JOZEF WILHEMUS
Year of Publication 28.08.2014
Get full text
Year of Publication 28.08.2014
Patent
FLUID EXTRACTION SYSTEM, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
ROPS CORNELIUS MARIA, RIEPEN MICHAEL, VAN BALLEGOIJ ROBERTUS NICODEMUS JACOBUS, VAN DE WINKEL JIMMY MATHEUS WILHELMUS, BERKVENS PAUL PETRUS JOANNES, METSENAERE CHRISTOPHE DE, VERMAELEN MARKUS MARTINUS PETRUS ADRIANUS, KEMPER NICOLAAS R, VAN DEN HEUVEL MARTINUS WILHELMUS
Year of Publication 16.08.2012
Get full text
Year of Publication 16.08.2012
Patent
Lithographischer Projektionsapparat mit einer Stützanordnung
AUER, FRANK, VAN BALLEGOIJ, ROBERTUS NICODEMUS JACOBUS, CUIJPERS, MARTINUS AGNES WILLEM
Year of Publication 20.03.2008
Get full text
Year of Publication 20.03.2008
Patent
Lithographic projection apparatus with a supporting assembly
AUER, FRANK, VAN BALLEGOIJ, ROBERTUS NICODEMUS JACOBUS, CUIJPERS, MARTINUS AGNES WILLEM
Year of Publication 18.07.2007
Get full text
Year of Publication 18.07.2007
Patent