Quantification of germanium and boron in heterostructures Si/Si1−xGex/Si by SIMS
Prudon, G, Gautier, B, Dupuy, J.C, Dubois, C, Bonneau, M, Delmas, J, Vallard, J.P, Bremond, G, Brenier, R
Published in Thin solid films (15.02.1997)
Published in Thin solid films (15.02.1997)
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Journal Article
Quantification of germanium and boron in heterostructures Si/Si 1− xGe x/Si by SIMS
Prudon, G, Gautier, B, Dupuy, J.C, Dubois, C, Bonneau, M, Delmas, J, Vallard, J.P, Bremond, G, Brenier, R
Published in Thin solid films (1997)
Published in Thin solid films (1997)
Get full text
Journal Article