Gated contact chains for process characterization in FinFET technologies
Brozek, Tomasz, Lam, Stephen, Shia Yu, Pak, Mike, Liu, Tom, Valishayee, Rakesh, Yokoyama, Nobuharu
Published in 2014 International Conference on Microelectronic Test Structures (ICMTS) (01.03.2014)
Published in 2014 International Conference on Microelectronic Test Structures (ICMTS) (01.03.2014)
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