Ultra miniaturized InterDigitated electrodes platform for sensing applications
Wang, Z., Syed, A., Bhattacharya, S., Chen, X., Buttner, U., Iordache, G., Salama, K., Ganetsos, Th, Valamontes, E., Georgas, A., Raptis, I., Oikonomou, P., Botsialas, A., Sanopoulou, M.
Published in Microelectronic engineering (15.03.2020)
Published in Microelectronic engineering (15.03.2020)
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Journal Article
In-situ characterization of the development step of high-resolution e-beam resists
Mpatzaka, T., Papageorgiou, G., Papanikolaou, N., Valamontes, E., Ganetsos, Th, Goustouridis, D., Raptis, I., Zisis, G.
Published in Micro and Nano Engineering (01.11.2020)
Published in Micro and Nano Engineering (01.11.2020)
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Journal Article
Chemocapacitor performance modeling by means of polymer swelling optical measurements
Oikonomou, P., Botsialas, A., Manoli, K., Goustouridis, D., Valamontes, E., Sanopoulou, M., Raptis, I., Patsis, G.P.
Published in Sensors and actuators. B, Chemical (01.08.2012)
Published in Sensors and actuators. B, Chemical (01.08.2012)
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Journal Article
Integrated tool for the spreading, thermal treatment and in situ process monitoring of thick photoresist films
Goustouridis, D., Raptis, I., Valamontes, E., Chatzichrisitidi, M.
Published in Microelectronic engineering (01.05.2010)
Published in Microelectronic engineering (01.05.2010)
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Journal Article
Conference Proceeding
Performance simulation, realization and evaluation of capacitive sensor arrays for the real time detection of volatile organic compounds
Oikonomou, P., Patsis, G.P., Botsialas, A., Manoli, K., Goustouridis, D., Pantazis, N.A., Kavadias, A., Valamontes, E., Ganetsos, Th, Sanopoulou, M., Raptis, I.
Published in Microelectronic engineering (01.08.2011)
Published in Microelectronic engineering (01.08.2011)
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Journal Article
Conference Proceeding
Dissolution properties of ultrathin photoresist films with multiwavelength interferometry
Kokkinis, A, Valamontes, E S, Raptis, I
Published in Journal of physics. Conference series (01.01.2005)
Published in Journal of physics. Conference series (01.01.2005)
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Journal Article
High aspect ratio micro/nano machining with proton beam writing on aqueous developable – easily stripped negative chemically-amplified resists
Chatzichristidi, M., Valamontes, E., Argitis, P., Raptis, I., van Kan, J.A., Zhang, F., Watt, F.
Published in Microelectronic engineering (01.05.2008)
Published in Microelectronic engineering (01.05.2008)
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Journal Article
Conference Proceeding
Surface modification of Si-containing polymers during etching for bilayer lithography
Eon, D., de Poucques, L., Peignon, M.C., Cardinaud, Ch, Turban, G., Tserepi, A., Cordoyiannis, G., Valamontes, E.S., Raptis, I., Gogolides, E.
Published in Microelectronic engineering (01.07.2002)
Published in Microelectronic engineering (01.07.2002)
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Journal Article
Conference Proceeding
Surface roughness induced by plasma etching of Si-containing polymers
Tserepi, A., Gogolides, E., Constantoudis, V., Cordoyiannis, G., Raptis, I., Valamontes, E. S.
Published in Journal of adhesion science and technology (01.01.2003)
Published in Journal of adhesion science and technology (01.01.2003)
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Journal Article
Surface and line-edge roughness in plasma-developed resists
Tserepi, A., Valamontes, E.S., Tegou, E., Raptis, I., Gogolides, E.
Published in Microelectronic engineering (01.09.2001)
Published in Microelectronic engineering (01.09.2001)
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Journal Article
Conference Proceeding
Electron beam lithography simulation for high resolution and high-density patterns
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Journal Article
Conference Proceeding
Aqueous base developable : easy stripping, high aspect ratio negative photoresist for optical and proton beam lithography
CHATZICHRISTIDI, M, RAJTA, I, SPELIOTIS, Th, VALAMONTES, E, GOUSTOURIDIS, D, ARGITIS, P, RAPTIS, I
Published in Microsystem technologies (01.10.2008)
Published in Microsystem technologies (01.10.2008)
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Conference Proceeding
Journal Article
Proton beam micromachining on strippable aqueous base developable negative resist
Rajta, I., Baradács, E., Chatzichristidi, M., Valamontes, E.S., Uzonyi, I., Raptis, I.
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.04.2005)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.04.2005)
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Journal Article
The helicoid multi-groove molecular and the turbomolecular vacuum pumps in molecular state under the scope of statistical behavior of molecules
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Journal Article
Conference Proceeding
Thickness determination of thin films based on x-ray signal decay law
Kaltsas, G., Glezos, N., Valamontes, E., Nassiopoulou, A. G.
Published in Surface and interface analysis (01.11.1998)
Published in Surface and interface analysis (01.11.1998)
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Journal Article