A New Breed of Wet-Developable BARC Materials
Vyklicky, Libor, Huang, Wu-Song, Popova, Irene, Varanasi, Pushkara Rao, Cameron, James, Amara, Johan, Sung, Jin Wuk, Valeri, David, Prokopowicz, Greg, Ware, Adam, O'Connell, Kathleen, Desisto, Jason, Vohra, Vaishali, O'Shea, Kevin, Barclay, George, Yamamoto, Yoshihiro, Kurihara, Tomoki, Hidano, Manabu
Published in Journal of Photopolymer Science and Technology (01.01.2009)
Published in Journal of Photopolymer Science and Technology (01.01.2009)
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Journal Article
Design and Development of Developable BARCs (DBARCs) for Advanced Lithographic Applications
Cameron, James, Amara, John, Sung, Jin Wuk, Valeri, David, Ware, Adam, O'Shea, Kevin, Yamamoto, Yoshihiro, Kitaguchi, Hiroaki, Vyklicky, Libor, Popova, Irene, Varanashi, Pushkara Rao
Published in Journal of Photopolymer Science and Technology (01.01.2010)
Published in Journal of Photopolymer Science and Technology (01.01.2010)
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Journal Article
Highly Efficient Fluorescence Quenching with Graphene
Kasry, Amal, Ardakani, Ali A, Tulevski, George S, Menges, Bernhard, Copel, Matthew, Vyklicky, Libor
Published in Journal of physical chemistry. C (02.02.2012)
Published in Journal of physical chemistry. C (02.02.2012)
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Journal Article
Graded Spin-on Organic Bottom Antireflective Coating for High NA Immersion Lithography
Goldfarb, Dario L., Vyklicky, Libor, Burns, Sean D., Petrillo, Karen, Arnold, John, Lisi, Anthony, Pfeiffer, Dirk, Sanders, Daniel D., Allen, Robert D., Medeiros, David R., Owe-Yang, Dah Chung, Noda, Kazumi, Tachiban, Seiichiro, Shirai, Shozo
Published in Journal of Photopolymer Science and Technology (01.01.2008)
Published in Journal of Photopolymer Science and Technology (01.01.2008)
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Journal Article
Helical Discotic Liquid Crystals
Vyklický, Libor, Eichhorn, S. Holger, Katz, Thomas J
Published in Chemistry of materials (23.09.2003)
Published in Chemistry of materials (23.09.2003)
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Journal Article
Functionalizations of [6]- and [7]Helicenes at Their Most Sterically Hindered Positions
Paruch, Kamil, Vyklický, Libor, Wang, David Zhigang, Katz, Thomas J, Incarvito, Christopher, Zakharov, Lev, Rheingold, Arnold L
Published in Journal of organic chemistry (31.10.2003)
Published in Journal of organic chemistry (31.10.2003)
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Journal Article