Copper Catalysis Effect Investigation for TiW Etch Process on Patterned Wafers
Votta, Annamaria, Bellandi, Enrico, Venegoni, Ivan, Alessandri, Mauro, Pipia, Francesco
Published in Solid state phenomena (01.02.2021)
Published in Solid state phenomena (01.02.2021)
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Journal Article
AlCu Pitting Prevention in Post Etch Cleaning
Morandi, Roberto, Ravasio, Marcello, Votta, Annamaria, Tagliabue, Giovanni, Alessandri, Mauro, Pipia, Francesco
Published in Solid state phenomena (01.08.2018)
Published in Solid state phenomena (01.08.2018)
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Journal Article
Post CMP Wet Cleaning Influence on Cu Hillocks
Moroni, Maurizio, Livellara, Luisito, Spadoni, Simona, Votta, Annamaria, Colpani, Paolo, Alessandri, Mauro, Pipia, Francesco, Grasso, Salvatore, Caminati, Manuela, Bollin, Maddalena, Ravizza, Enrica
Published in Solid state phenomena (01.09.2016)
Published in Solid state phenomena (01.09.2016)
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Journal Article
Integrated electronic device with a redistribution region and a high resilience to mechanical stresses and method for its preparation
Pipia, Francesco Maria, Venegoni, Ivan, Votta, Annamaria, Milanesi, Francesca, Colpani, Paolo, Sciarrillo, Samuele
Year of Publication 21.02.2023
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Year of Publication 21.02.2023
Patent
Study of SiO2 Modifications Induced by Oxygen Plasmas and Their Effect on Wet Processes
Votta, Annamaria, Bellandi, Enrico, Alessandri, Mauro, Vedda, Anna, Ferretti, Anna, Fasoli, Mauro, Moretti, Federico
Published in ECS transactions (28.09.2007)
Published in ECS transactions (28.09.2007)
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Journal Article
INTEGRATED ELECTRONIC DEVICE WITH A REDISTRIBUTION REGION AND A HIGH RESILIENCE TO MECHANICAL STRESSES AND METHOD FOR ITS PREPARATION
MILANESI, Francesca, VENEGONI, Ivan, PIPIA, Francesco Maria, VOTTA, Annamaria, COLPANI, Paolo, SCIARRILLO, Samuele
Year of Publication 10.12.2020
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Year of Publication 10.12.2020
Patent
Integrated electronic device with a redistribution region and a high resilience to mechanical stresses and method for its preparation
Pipia, Francesco Maria, Venegoni, Ivan, Votta, Annamaria, Milanesi, Francesca, Colpani, Paolo, Sciarrillo, Samuele
Year of Publication 29.09.2020
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Year of Publication 29.09.2020
Patent
INTEGRATED ELECTRONIC DEVICE WITH A REDISTRIBUTION REGION AND A HIGH RESILIENCE TO MECHANICAL STRESSES AND METHOD FOR ITS PREPARATION
Pipia, Francesco Maria, Venegoni, Ivan, Votta, Annamaria, Milanesi, Francesca, Colpani, Paolo, Sciarrillo, Samuele
Year of Publication 31.01.2019
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Year of Publication 31.01.2019
Patent
DISPOSITIVO ELETTRONICO INTEGRATO CON REGIONE DI REDISTRIBUZIONE E ELEVATA RESISTENZA AGLI STRESS MECCANICI E SUO METODO DI PREPARAZIONE
VOTTA, ANNAMARIA, SCIARRILLO, SAMUELE, COLPANI, PAOLO, PIPIA, FRANCESCO MARIA, VENEGONI, IVAN, MILANESI, FRANCESCA
Year of Publication 28.01.2019
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Year of Publication 28.01.2019
Patent