Processes and apparatus for preparing heterostructures with reduced strain by radial distension
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Year of Publication 21.04.2018
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EPITAXIAL WAFER HAVING A HEAVILY DOPED SUBSTRATE AND PROCESS FOR THE PREPARATION THEREOF
FALSTER ROBERT J, CHO CHANRAE, RAVANI MARCO, VORONKOV VLADIMIR V, LEE DONGMYUN, MOIRAGHI LUCA
Year of Publication 13.10.2011
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Year of Publication 13.10.2011
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Process for preparing single crystal silicon having improved gate oxide integrity
Falster, Robert J, Voronkov, Vladimir V, Mutti, Paolo, Bonoli, Francesco
Year of Publication 07.10.2008
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Year of Publication 07.10.2008
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DIFFUSION CONTROL IN HEAVILY DOPED SUBSTRATES
LEE, DONG, MYUN, RAVANI, MARCO, FALSTER, ROBERT, J, CHO, CHANRAE, VORONKOV, VLADIMIR, V, MOIRAGHI, LUCA
Year of Publication 17.03.2010
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Year of Publication 17.03.2010
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EPITAXIAL WAFER HAVING A HEAVILY DOPED SUBSTRATE AND PROCESS FOR THE PREPARATION THEREOF
FALSTER ROBERT J, CHO CHANRAE, RAVANI MARCO, VORONKOV VLADIMIR V, LEE DONGMYUN, MOIRAGHI LUCA
Year of Publication 08.10.2009
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Year of Publication 08.10.2009
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