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WUISTER SANDER FREDERIK, VOORTHUIJZEN WILLEM PIETER, VAN LARE MARIE CLAIRE
Year of Publication 07.03.2023
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Year of Publication 07.03.2023
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레지스트 조성물
WUISTER SANDER FREDERIK, VOORTHUIJZEN WILLEM PIETER, VAN LARE MARIE CLAIRE
Year of Publication 30.01.2019
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Year of Publication 30.01.2019
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EUV A MEMBRANE FOR EUV LITHOGRAPHY
DE GRAAF DENNIS, PETER MARIA, JANSSEN PAUL, VAN DE KERKHOF MARCUS ADRIANUS, VLES DAVID FERDINAND, VOORTHUIJZEN WILLEM PIETER, VAN ZWOL PIETER JAN, VAN DER ZANDE WILLEM JOAN
Year of Publication 18.10.2022
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Year of Publication 18.10.2022
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EUV Membrane for EUV lithography
PETER MARIA, NASALEVICH MAXIM ALEKSANDROVICH, VAN DE KERKHOF MARCUS ADRIANUS, BANERJEE NIRUPAM, ZDRAVKOV ALEXANDAR NIKOLOV, VERBURG ANTONIUS WILLEM, BLAUW MICHIEL ALEXANDER, BROUNS DERK SERVATIUS GERTRUDA, VERMEULEN JOHANNES PETRUS MARTINUS BERNARDUS, LENDERINK EGBERT, NIKIPELOV ANDREY, RISPENS GIJSBERT, JANSSEN PAUL, ABEGG ERIK ACHILLES, VLES DAVID FERDINAND, VOORTHUIJZEN WILLEM PIETER, KRUIZINGA MATTHIAS, VAN ZWOL PIETER JAN, PILIEGO CLAUDIA, VAN DER ZANDE WILLEM JOAN, SCHUH NADJA, MAXIM NICOLAE, NOTENBOOM ARNOUD WILLEM
Year of Publication 16.02.2023
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Year of Publication 16.02.2023
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The pellicle and pellicle assembly
MEIJER MARCEL PETER, PETER MARIA, NASALEVICH MAXIM ALEKSANDROVICH, ZDRAVKOV ALEXANDAR NIKOLOV, KNAPEN PETER SIMON ANTONIUS, OLSMAN RAYMOND, ANDE CHAITANYA KRISHNA, VAN DEN BOSCH GERRIT, VERMEULEN JOHANNES PETRUS MARTINUS BERNARDUS, JANSSEN JOHANNES JOSEPH, JANSSEN PAUL, VLES DAVID FERDINAND, GIESBERS ADRIANUS JOHANNES MARIA, PATEL HRISHIKESH, VOORTHUIJZEN WILLEM PIETER, MEIJERINK WOUTER ROGIER, VAN DEN EINDEN WILHELMUS THEODORUS ANTHONIUS JOHANNES, VAN ZWOL PIETER JAN, WONDERGEM HENDRIKUS JAN, KLOOTWIJK JOHAN HENDRIK, KURGANOVA EVGENIA, VAN DER ZANDE WILLEM JOAN, NOTENBOOM ARNOUD WILLEM, DE GROOT ANTONIUS FRANCISCUS JOHANNES
Year of Publication 09.12.2022
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Year of Publication 09.12.2022
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그래핀 펠리클 리소그래피 장치
PETER MARIA, NASALEVICH MAXIM ALEKSANDROVICH, GIESBERS ADRIANUS JOHANNES MARIA, VLES DAVID FERDINAND, VOLLEBREGT STEN, VOORTHUIJZEN WILLEM PIETER, VAN ZWOL PIETER JAN, KLEIN ALEXANDER LUDWIG, KURGANOVA EVGENIA, NOTENBOOM ARNOUD WILLEM
Year of Publication 18.11.2020
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Year of Publication 18.11.2020
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EUV Membrane for EUV lithography
PETER MARIA, NASALEVICH MAXIM ALEKSANDROVICH, VAN DE KERKHOF MARCUS ADRIANUS, BANERJEE NIRUPAM, ZDRAVKOV ALEXANDAR NIKOLOV, VERBURG ANTONIUS WILLEM, BLAUW MICHIEL ALEXANDER, BROUNS DERK SERVATIUS GERTRUDA, VERMEULEN JOHANNES PETRUS MARTINUS BERNARDUS, LENDERINK EGBERT, NIKIPELOV ANDREY, RISPENS GIJSBERT, JANSSEN PAUL, ABEGG ERIK ACHILLES, VLES DAVID FERDINAND, VOORTHUIJZEN WILLEM PIETER, KRUIZINGA MATTHIAS, VAN ZWOL PIETER JAN, PILIEGO CLAUDIA, VAN DER ZANDE WILLEM JOAN, SCHUH NADJA, MAXIM NICOLAE, NOTENBOOM ARNOUD WILLEM
Year of Publication 24.12.2021
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Year of Publication 24.12.2021
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멤브레인 어셈블리
PETER MARIA, JANSSEN PAUL, KAMALI MOHAMMAD REZA, VLES DAVID FERDINAND, VOORTHUIJZEN WILLEM PIETER, VAN ZWOL PIETER JAN, BROUNS DERK SERVATIUS GERTRUDA, VAN DER ZANDE WILLEM JOAN
Year of Publication 22.08.2018
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Year of Publication 22.08.2018
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EUV 리소그래피용 멤브레인
DE GRAAF DENNIS, PETER MARIA, JANSSEN PAUL, VAN DE KERKHOF MARCUS ADRIANUS, VLES DAVID FERDINAND, VOORTHUIJZEN WILLEM PIETER, VAN ZWOL PIETER JAN, VAN DER ZANDE WILLEM JOAN
Year of Publication 22.08.2018
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Year of Publication 22.08.2018
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펠리클 및 펠리클 조립체
MEIJER MARCEL PETER, PETER MARIA, NASALEVICH MAXIM ALEKSANDROVICH, ZDRAVKOV ALEXANDAR NIKOLOV, KNAPEN PETER SIMON ANTONIUS, OLSMAN RAYMOND, ANDE CHAITANYA KRISHNA, VAN DEN BOSCH GERRIT, VERMEULEN JOHANNES PETRUS MARTINUS BERNARDUS, JANSSEN JOHANNES JOSEPH, JANSSEN PAUL, VLES DAVID FERDINAND, GIESBERS ADRIANUS JOHANNES MARIA, PATEL HRISHIKESH, VOORTHUIJZEN WILLEM PIETER, MEIJERINK WOUTER ROGIER, VAN DEN EINDEN WILHELMUS THEODORUS ANTHONIUS JOHANNES, VAN ZWOL PIETER JAN, WONDERGEM HENDRIKUS JAN, KLOOTWIJK JOHAN HENDRIK, KURGANOVA EVGENIA, VAN DER ZANDE WILLEM JOAN, NOTENBOOM ARNOUD WILLEM, DE GROOT ANTONIUS FRANCISCUS JOHANNES
Year of Publication 12.02.2020
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Year of Publication 12.02.2020
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펠리클 및 펠리클 조립체
PETER MARIA, NASALEVICH MAXIM ALEKSANDROVICH, VAN DE KERKHOF MARCUS ADRIANUS, BROUNS DERK SERVATIUS GERTRUDA, VERMEULEN JOHANNES PETRUS MARTINUS BERNARDUS, JANSSEN PAUL, VLES DAVID FERDINAND, ABEGG ERIK ACHILLES, VOORTHUIJZEN WILLEM PIETER, GOVIL PRADEEP K, VAN ZWOL PIETER JAN, BENDIKSEN AAGE, VAN DER ZANDE WILLEM JOAN, NOTENBOOM ARNOUD WILLEM, WILEY JAMES NORMAN
Year of Publication 27.08.2018
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Year of Publication 27.08.2018
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리소그래피 장치를 위한 펠리클 제조 방법, 리소그래피 장치를 위한 펠리클 장치, 리소그래피 장치, 디바이스 제조 방법, 펠리클 처리 장치, 및 펠리클 처리 방법
PETER MARIA, NASALEVICH MAXIM ALEKSANDROVICH, ABEGG ERIK ACHILLES, GIESBERS ADRIANUS JOHANNES MARIA, VLES DAVID FERDINAND, VOORTHUIJZEN WILLEM PIETER, VAN DEN EINDEN WILHELMUS THEODORUS ANTHONIUS JOHANNES, VAN ZWOL PIETER JAN, KLOOTWIJK JOHAN HENDRIK, VAN DER ZANDE WILLEM JOAN, VERMEULEN JOHANNES PETRUS MARTINUS BERNARDUS
Year of Publication 29.06.2018
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Year of Publication 29.06.2018
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EUV 리소그래피를 위한 멤브레인
PETER MARIA, NASALEVICH MAXIM ALEKSANDROVICH, VAN DE KERKHOF MARCUS ADRIANUS, BANERJEE NIRUPAM, ZDRAVKOV ALEXANDAR NIKOLOV, VERBURG ANTONIUS WILLEM, BLAUW MICHIEL ALEXANDER, BROUNS DERK SERVATIUS GERTRUDA, VERMEULEN JOHANNES PETRUS MARTINUS BERNARDUS, LENDERINK EGBERT, NIKIPELOV ANDREY, RISPENS GIJSBERT, JANSSEN PAUL, ABEGG ERIK ACHILLES, VLES DAVID FERDINAND, VOORTHUIJZEN WILLEM PIETER, KRUIZINGA MATTHIAS, VAN ZWOL PIETER JAN, PILIEGO CLAUDIA, VAN DER ZANDE WILLEM JOAN, SCHUH NADJA, MAXIM NICOLAE, NOTENBOOM ARNOUD WILLEM
Year of Publication 20.12.2018
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Year of Publication 20.12.2018
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멤브레인 조립체를 제조하는 방법
PETER MARIA, CASIMIRI ERIC WILLEM FELIX, VERBRUGGE BEATRIJS LOUISE MARIE JOSEPH KATRIEN, LEENDERS MARTINUS HENDRIKUS ANTONIUS, VERMEULEN JOHANNES PETRUS MARTINUS BERNARDUS, KUIJKEN MICHAEL ALFRED JOSEPHUS, HOUWELING ZOMER SILVESTER, JANSSEN PAUL, OOSTERHOFF SICCO, VLES DAVID FERDINAND, VOORTHUIJZEN WILLEM PIETER, DRUZHININA TAMARA, VAN ZWOL PIETER JAN, VAN DER ZANDE WILLEM JOAN
Year of Publication 10.05.2018
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Year of Publication 10.05.2018
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A MEMBRANE ASSEMBLY
VOORTHUIJZEN, WILLEM-PIETER, VAN DER ZANDE, WILLEM JOAN, VAN ZWOL, PIETER-JAN, KAMALI, MOHAMMAD REZA, BROUNS, DERK SERVATIUS GERTRUDA, PETER, MARIA, JANSSEN, PAUL, VLES, DAVID FERDINAND
Year of Publication 07.05.2024
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Year of Publication 07.05.2024
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Simultaneous double-side coating of multilayer graphene pellicle by local thermal processing
Péter, Mária, Voorthuijzen, Willem-Pieter, Kurganova, Evgenia, Nasalevich, Maxim Aleksandrovich, Vles, David Ferdinand, Giesbers, Adrianus Johannes Maria, Van Zwol, Pieter-Jan, Notenboom, Arnoud Willem
Year of Publication 02.04.2024
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Year of Publication 02.04.2024
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SIMULTANEOUS DOUBLE-SIDED COATING OF A MULTILAYER GRAPHENE PELLICLE BY LOCAL THERMAL PROCESSING
VLES, David, Ferdinand, NASALEVICH, Maxim, Aleksandrovich, NOTENBOOM, Arnoud, Willem, GIESBERS, Adrianus, Johannes, Maria, PÉTER, Mária, VAN ZWOL, Pieter-Jan, KURGANOVA, Evgenia, VOORTHUIJZEN, Willem-Pieter
Year of Publication 06.12.2023
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Year of Publication 06.12.2023
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RESIST COMPOSITIONS
WUISTER, Sander Frederik, VAN LARE, Marie-Claire, VOORTHUIJZEN, Willem-Pieter
Year of Publication 02.05.2019
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Year of Publication 02.05.2019
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Pellicle and pellicle assembly
Van Der Zande, Willem Joan, Péter, Mária, Janssen, Paul, Voorthuijzen, Willem-Pieter, Bendiksen, Aage, Vermeulen, Johannes Petrus Martinus Bernardus, Govil, Pradeep K, Abegg, Erik Achilles, Brouns, Derk Servatius Gertruda, Van Zwol, Pieter-Jan, Van De Kerkhof, Marcus Adrianus, Vles, David Ferdinand, Nasalevich, Maxim Aleksandrovich, Wiley, James Norman, Notenboom, Arnoud Willem
Year of Publication 20.08.2024
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Year of Publication 20.08.2024
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