Mo/Si multilayer-coated amplitude-division beam splitters for XUV radiation sources
Sobierajski, Ryszard, Loch, Rolf Antonie, van de Kruijs, Robbert W. E., Louis, Eric, von Blanckenhagen, Gisela, Gullikson, Eric M., Siewert, Frank, Wawro, Andrzej, Bijkerk, Fred
Published in Journal of synchrotron radiation (01.03.2013)
Published in Journal of synchrotron radiation (01.03.2013)
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Journal Article
REFLECTIVE OPTICAL ELEMENT AND OPTICAL SYSTEM FOR EUV LITHOGRAPHY
EHM, Dirk Heinrich, MUELLENDER, Stephan, BLANCKENHAGEN, Gisela von, HUBER, Peter
Year of Publication 04.07.2018
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Year of Publication 04.07.2018
Patent