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Published in Journal of physical chemistry. C (02.05.2013)
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하전 입자 빔 디바이스로 샘플을 검사하는 방법, 및 하전 입자 빔 디바이스
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Successive Spray Deposition of P3HT/PCBM Organic Photoactive Layers: Material Composition and Device Characteristics
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Band Gap Tuning in Poly(triazine imide), a Nonmetallic Photocatalyst
MCDERMOTT, Eamon J, WIRNHIER, Eva, SCHNICK, Wolfgang, SINGH VIRDI, Kulpreet, SCHEU, Christina, KAUFFMANN, Yaron, KAPLAN, Wayne D, KURMAEV, Ernst Z, MOEWES, Alexander
Published in Journal of physical chemistry. C (2013)
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Published in Journal of physical chemistry. C (2013)
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Method for automated critical dimension measurement on a substrate for display manufacturing, method of inspecting a large area substrate for display manufacturing, apparatus for inspecting a large area substrate for display manufacturing and method of operating thereof
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Year of Publication 27.06.2023
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Method of automatically focusing a charged particle beam on a surface region of a sample, method of calculating a converging set of sharpness values of images of a charged particle beam device and charged particle beam device for imaging a sample
Trauner, Robert, Mueller, Bernhard G, Knaub, Nikolai, Virdi, Kulpreet Singh, Schüler, Bernhard
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Year of Publication 21.03.2023
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METHOD OF AUTOMATICALLY FOCUSING A CHARGED PARTICLE BEAM ON A SURFACE REGION OF A SAMPLE, METHOD OF CALCULATING A CONVERGING SET OF SHARPNESS VALUES OF IMAGES OF A CHARGED PARTICLE BEAM DEVICE AND CHARGED PARTICLE BEAM DEVICE FOR IMAGING A SAMPLE
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Year of Publication 16.02.2022
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METHOD OF AUTOMATICALLY FOCUSING A CHARGED PARTICLE BEAM ON A SURFACE REGION OF A SAMPLE, METHOD OF CALCULATING A CONVERGING SET OF SHARPNESS VALUES OF IMAGES OF A CHARGED PARTICLE BEAM DEVICE AND CHARGED PARTICLE BEAM DEVICE FOR IMAGING A SAMPLE
KNAUB, Nikolai, VIRDI, Kulpreet Singh, TRAUNER, Robert, SCHÜLER, Bernhard, MUELLER, Bernhard G
Year of Publication 10.02.2022
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Year of Publication 10.02.2022
Patent