Patterning of 2-10 nanometer-scale plasma-polymerized organic films by atomic force microscope
VINOGRADOV, G. K, GORWADKAR, S, SENDA, K, MORITA, S
Published in Japanese Journal of Applied Physics (01.11.1994)
Published in Japanese Journal of Applied Physics (01.11.1994)
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Journal Article
UV, X-RAY AND E-BEAM SENSITIVE PLASMA POLYMERLIZED RESISTS
Takenouchi, H., Senda, K., Uchida, T., Inanami, R., Vinogradov, G.K., Morita, Shinzo
Published in Journal of Photopolymer Science and Technology (1995)
Published in Journal of Photopolymer Science and Technology (1995)
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Journal Article
Recent trends in 300-mm plasma equipment
Vinogradov, G.Y.
Published in 2003 8th International Symposium Plasma- and Process-Induced Damage (2003)
Published in 2003 8th International Symposium Plasma- and Process-Induced Damage (2003)
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Conference Proceeding
Functional plasma-polymerized thin films prepared by a new type of reactor
Morita, S., Naganawa, T., Jong-Taek Kim, Duck-Chool Lee, Vinogradov, G.K.
Published in [1991] Proceedings of the 3rd International Conference on Properties and Applications of Dielectric Materials (1991)
Published in [1991] Proceedings of the 3rd International Conference on Properties and Applications of Dielectric Materials (1991)
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Conference Proceeding