Low dielectric constant material and method of processing by CVD
O'Neill, Mark Leonard, Lukas, Aaron Scott, Bitner, Mark Daniel, Vincent, Jean Louise, Vrtis, Raymond Nicholas, Peterson, Brian K
Year of Publication 11.07.2006
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Year of Publication 11.07.2006
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Low dielectric constant material and method of processing by CVD
BITNER MARK DANIEL, VINCENT JEAN LOUISE, O'NEILL MARK LEONARD, LUKAS AARON SCOTT, VRTIS RAYMOND NICHOLAS, PETERSON BRIAN K
Year of Publication 11.07.2006
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Year of Publication 11.07.2006
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Low dielectric constant material and method of processing by cvd
VRTIS, RAYMOND NICHOLAS, PETERSON, BRIAN KEITH, VINCENT, JEAN LOUISE, O'NEILL, MARK LEONARD
Year of Publication 21.04.2004
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Year of Publication 21.04.2004
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MATERIAL AND METHOD FOR FORMING CONTROLLED PORE
BITNER MARK DANIEL, VINCENT JEAN LOUISE, KARWACKI EUGENE J JR, WU DINGJUN, O'NEILL MARK LEONARD, LUKAS AARON SCOTT, VRTIS RAYMOND NICHOLAS
Year of Publication 29.11.2007
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Year of Publication 29.11.2007
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MATERIALS AND METHODS OF FORMING CONTROLLED VOID
WU DING JUN, BITNER MARK DANIEL, VINCENT JEAN LOUISE, EUGENE JOSEPH KARWACKI, JR, OAENEILL MARK LEONARD, LUKAS AARON SCOTT, VRTIS RAYMOND NICHOLAS
Year of Publication 29.11.2007
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Year of Publication 29.11.2007
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Low dielectric constant material and method of processing by CVD
O'Neill, Mark Leonard, Peterson, Brian Keith, Vincent, Jean Louise, Vrtis, Raymond Nicholas
Year of Publication 06.04.2004
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Year of Publication 06.04.2004
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Low dielectric constant material and method of processing by CVD
PETERSON BRIAN KEITH, VINCENT JEAN LOUISE, O'NEILL MARK LEONARD, VRTIS RAYMOND NICHOLAS
Year of Publication 06.04.2004
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Year of Publication 06.04.2004
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MATERIALS AND METHODS OF FORMING CONTROLLED VOID
MARK LEONARD O'NEILL, JEAN LOUISE VINCENT, MARK DANIEL BITNER, RAYMOND NICHOLAS VRTIS, EUGENE JOSEPH KARWACKI JR, DINGJUN WU, AARON SCOTT LUKAS
Year of Publication 23.10.2007
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Year of Publication 23.10.2007
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Method of forming low dielectric constant interlayer dielectric film
VINCENT JEAN LOUISE, O'NEILL MARK LEONARD, WITHERS HOWARD PAUL JR, VRTIS RAYMOND NICHOLAS, BECK SCOTT E
Year of Publication 27.07.2005
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Year of Publication 27.07.2005
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