A model for etching of three-dimensional high aspect ratio silicon structures in pulsed inductively coupled plasmas
Wang, J-C, Tian, W, Rauf, S, Sadighi, S, Kenney, J, Stout, P, Vidyarthi, V S, Guo, J, Zhou, T, Delfin, K, Lundy, N, Pandey, S C, Guo, S, Sandhu, G S
Published in Plasma sources science & technology (14.09.2018)
Published in Plasma sources science & technology (14.09.2018)
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Journal Article
Ruddlesden-Popper Phase Formation in Pb(Zr,Ti)O3 Thin Films
Suchaneck, G., Vidyarthi, V. S., Gerlach, G., Reibold, M., Levin, A. A., Meyer, D. C.
Published in Ferroelectrics (01.01.2008)
Published in Ferroelectrics (01.01.2008)
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Conference Proceeding
Reactive magnetron sputtering from a composite target for large area BaPbO3 thin film electrode
VIDYARTHI, V. S, SUCHANECK, G, GERLACH, G, LEVIN, A. A, MEYER, D. C, GRÖTZSCHEL, R
Published in Thin solid films (31.05.2010)
Published in Thin solid films (31.05.2010)
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Journal Article
A 150 mm Wafer Technology for Highly (111) Oriented Pb(Zr,Ti)O3 Films on BaPbO3/Pt Electrode
Vidyarthi, V. S., Suchaneck, G., Reibold, M., Grötzschel, R., Gerlach, G.
Published in Ferroelectrics (28.10.2009)
Published in Ferroelectrics (28.10.2009)
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Conference Proceeding
A 150 mm Wafer Technology for Highly (111) Oriented Pb(Zr,Ti)O 3 Films on BaPbO 3 /Pt Electrode
Vidyarthi, V. S., Suchaneck, G., Reibold, M., Grötzschel, R., Gerlach, G.
Published in Ferroelectrics (28.10.2009)
Published in Ferroelectrics (28.10.2009)
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Journal Article
A 150 mm Wafer Technology for Highly (111) Oriented Pb(Zr,Ti)O3 Films on BaPbO3/Pt Electrode
Vidyarthi, V S, Suchaneck, G, Reibold, M, Grotzschel, R, Gerlach, G
Published in Ferroelectrics (01.10.2009)
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Published in Ferroelectrics (01.10.2009)
Journal Article
Ruddlesden-Popper Phase Formation in Pb(Zr,Ti)O 3 Thin Films
Suchaneck, G., Vidyarthi, V. S., Gerlach, G., Reibold, M., Levin, A. A., Meyer, D. C.
Published in Ferroelectrics (21.10.2008)
Published in Ferroelectrics (21.10.2008)
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Journal Article
Multi-target reactive sputtering- : A promising technology for large-area Pb(Zr,Ti)O3 thin film deposition
SUCHANECK, G, LIN, W.-M, VIDYALTHI, V. S, GERLACH, G, HARTUNG, J
Published in Journal of the European Ceramic Society (2007)
Published in Journal of the European Ceramic Society (2007)
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Journal Article
Electron emission from ferroelectric thin films enhanced by the presence of 90 degree ferroelectric domains
Suchaneck, Gunnar, Vidyarthi, Vinay S, Gerlach, Gerald, Solnyshkin, Alexander V, Kislova, Inna L
Published in IEEE transactions on ultrasonics, ferroelectrics, and frequency control (01.12.2007)
Published in IEEE transactions on ultrasonics, ferroelectrics, and frequency control (01.12.2007)
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Journal Article
Electron emission from ferroelectric thin films enhanced by the presence of 90° ferroelectric domains
Suchaneck, G., Vidyarthi, V.S., Gerlach, G., Solnyshkin, A.V., Kislova, I.L.
Published in IEEE transactions on ultrasonics, ferroelectrics, and frequency control (01.12.2007)
Published in IEEE transactions on ultrasonics, ferroelectrics, and frequency control (01.12.2007)
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Journal Article
Large area deposition of Pb(Zr,Ti)O3 thin films for piezoelectric MEMS devices
Suchaneck, Gunnar, Vidyarthi, Vinay S., Reibold, Marianne, Deyneka, Alexander, Jastrabik, Lubomir, Gerlach, Gerald, Hartung, Johannes
Published in Journal of electroceramics (01.02.2008)
Published in Journal of electroceramics (01.02.2008)
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Conference Proceeding
Electron emission from ferroelectric thin films enhanced by the presence of ferroelectric domains
Suchaneck, G., Vidyarthi, V.S., Milde, G., Gerlach, G., Solnyshkin, A.V., Kislova, I., Otto, T., Reichenbach, R., Klumbies, H., Mieth, O., Eng, L.M.
Published in 2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics (01.05.2007)
Published in 2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics (01.05.2007)
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