Multi-target reactive sputtering- : A promising technology for large-area Pb(Zr,Ti)O3 thin film deposition
SUCHANECK, G, LIN, W.-M, VIDYALTHI, V. S, GERLACH, G, HARTUNG, J
Published in Journal of the European Ceramic Society (2007)
Published in Journal of the European Ceramic Society (2007)
Get full text
Conference Proceeding
Journal Article