Automated STEM/EDS Metrology Characterization of 3D NAND Devices
Zhong, Zhenxin, Roller, Justin, Bidiuk, Oleksii, Blackwood, Jeff, Verheijen, Martin, Ugurlu, Ozan, Donald, Jason
Published in Microscopy and microanalysis (01.07.2017)
Published in Microscopy and microanalysis (01.07.2017)
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Journal Article
THERMAL DRIFT CORRECTION BASED ON THERMAL MODELING
Verheijen, Martin, van Leeuwen, Hugo, Lamers, Ronald, van Wensveen, Marcel, Verschueren, Edwin, van den Oetelaar, Twan
Year of Publication 21.06.2023
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Year of Publication 21.06.2023
Patent
THERMAL DRIFT CORRECTION BASED ON THERMAL MODELING
VAN DEN OETELAAR, Johannes, VAN WENSVEEN, Marcel, VERHEIJEN, Martin, VAN LEEUWEN, Hugo, VERSCHUEREN, Edwin, LAMERS, Ronald
Year of Publication 15.06.2023
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Year of Publication 15.06.2023
Patent
Method of imaging a sample using an electron microscope
Verheijen, Martin, Voigt, Andreas, Franken, Erik Michiel, Deng, Yuchen, Schoenmakers, Remco, Kohr, Holger, Janssen, Bart Jozef
Year of Publication 02.03.2021
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Year of Publication 02.03.2021
Patent
METHOD OF IMAGING A SAMPLE USING AN ELECTRON MICROSCOPE
Verheijen, Martin, Voigt, Andreas, Franken, Erik Michiel, Deng, Yuchen, Schoenmakers, Remco, Kohr, Holger, Janssen, Bart Jozef
Year of Publication 28.05.2020
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Year of Publication 28.05.2020
Patent
METHOD OF IMAGING A SAMPLE USING AN ELECTRON MICROSCOPE
Verheijen, Martin, Voigt, Andreas, Franken, Erik Michiel, Deng, Yuchen, Schoenmakers, Remco, Kohr, Holger, Janssen, Bart Jozef
Year of Publication 27.05.2020
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Year of Publication 27.05.2020
Patent
METHOD OF IMAGING A SAMPLE USING AN ELECTRON MICROSCOPE
SCHOENMAKERS REMCO, VOIGT ANDREAS, JANSSEN BART JOZEF, FRANKEN ERIK MICHIEL, KOHR HOLGER, VERHEIJEN MARTIN, DENG YUCHEN
Year of Publication 02.06.2020
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Year of Publication 02.06.2020
Patent
High aspect ratio resist structures by E-beam overexposure
de Koning, Henk, Zandbergen, Peter, Verheijen, Martin J., Biermann, Udo K.P.
Published in Microelectronic engineering (01.02.1995)
Published in Microelectronic engineering (01.02.1995)
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Journal Article
Conference Proceeding
Comparative study of 3D measurement techniques (SPM, SEM, TEM) for submicron structures
van Helleputte, Henri R.J.R., Haddeman, Theo B.J., Verheijen, Martin J., Baalbergen, Jan-Jaap
Published in Microelectronic engineering (01.02.1995)
Published in Microelectronic engineering (01.02.1995)
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Conference Proceeding
Method of measuring the temperature of a sample carrier in a charged particle-optical apparatus
DONA PLEUN, VAN DEN BOOM STEPHANUS HUBERTUS LEONARDUS, KWAKMAN LAURENS FRANZ TAEMSZ, VERHEIJEN MARTIN, RÉMIGY HERVÉ-WILLIAM, SLINGERLAND HENDRIK NICOLAAS, VAN DE WATER GERBERT JEROEN, LUECKEN UWE
Year of Publication 24.06.2014
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Year of Publication 24.06.2014
Patent
Method of Measuring the Temperature of a Sample Carrier in a Charged Particle-Optical Apparatus
DONA PLEUN, VAN DEN BOOM STEPHANUS HUBERTUS LEONARDUS, KWAKMAN LAURENS FRANZ TAEMSZ, VERHEIJEN MARTIN, SLINGERLAND HENDRIK NICOLAAS, REMIGY HERVE-WILLIAM, LUECKEN UWE, VAN DER WATER GERBERT JEROEN
Year of Publication 24.05.2012
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Year of Publication 24.05.2012
Patent
Method of measuring the temperature of a sample carrier in a charged particle-optical apparatus
DONA PLEUN, VAN DEN BOOM STEPHANUS HUBERTUS LEONARDUS, KWAKMAN LAURENS FRANZ TAEMSZ, VERHEIJEN MARTIN, SLINGERLAND HENDRIK NICOLAAS, REMIGY HERVE-WILLIAM, LUECKEN UWE, VAN DER WATER GERBERT JEROEN
Year of Publication 04.07.2012
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Year of Publication 04.07.2012
Patent