(Invited) Supercritical Drying: A Sustainable Solution to Pattern Collapse of High-Aspect-Ratio and Low-Mechanical-Strength Device Structures
Chen, Han-Wen, Verhaverbeke, Steven, Gouk, Roman, Leschkies, Kurtis, Sun, Shiyu, Bekiaris, Nikos, Visser, Robert J.
Published in ECS transactions (11.09.2015)
Published in ECS transactions (11.09.2015)
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Journal Article
Development of an All-Wet-Etch Process Chemistry for the Patterning of Metal Conductors in Igzo Thin-Film-Transistors
Leschkies, Kurtis, Verhaverbeke, Steven, Yim, D. K., Hsu, H. C., Kim, H., Lim, R., White, J. M., Visser, Robert J.
Published in ECS transactions (31.08.2013)
Published in ECS transactions (31.08.2013)
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Journal Article
PACKAGE STRUCTURE AND FABRICATION METHODS
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Year of Publication 15.12.2023
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Year of Publication 15.12.2023
Patent
기판의 레이저 기계 가공을 위한 장치 및 방법
LESCHKIES KURTIS, FRANKLIN JEFFREY L, VERHAVERBEKE STEVEN, CELLERE GIORGIO, GIBACK PARK, FURIN VALENTINA, CHEN HAN WEN
Year of Publication 06.11.2023
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Year of Publication 06.11.2023
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저온의 열 산화물 품질에서 두꺼운 산화물 막들을 성장시키는 방법
LESCHKIES KURTIS, VERHAVERBEKE STEVEN, SWENBERG JOHANES F, COLOMBEAU BENJAMIN
Year of Publication 29.10.2021
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Year of Publication 29.10.2021
Patent
개선된 폴리머-구리 접착을 위한 방법들
CHAKRABORTY TAPASH, VERHAVERBEKE STEVEN, GORADIA PRERNA, BUCH CHINTAN, CHEN HAN WEN, CHO KYUIL, PARK GIBACK
Year of Publication 20.04.2023
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Year of Publication 20.04.2023
Patent
블라인드 비아들을 레이저 드릴링하는 방법 및 장치
LESCHKIES KURTIS, VERHAVERBEKE STEVEN, LEI WEI SHENG, GOUK ROMAN, SIVARAMAKRISHNAN VISWESWAREN
Year of Publication 10.03.2023
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Year of Publication 10.03.2023
Patent