METHODS OF DETERMINING CORRECTIONS FOR A PATTERNING PROCESS
YPMA ALEXANDER, WALLERBOS ERIK JOHANNES MARIA, ROELOFS WILLEM SEINE CHRISTIAN, DOVBUSH IRYNA, GROUWSTRA CEDRIC DESIRE, KUPERS MICHIEL, DELVIGNE ERIK HENRI ADRIAAN, HAUPTMANN MARC, DECKERS DAVID FRANS SIMON, KOU WEITIAN, GIOLLO MANUEL, CEKLI HAKKI ERGUN, VAN DER SANDEN STEFAN CORNELIS THEODORUS, VERGAIJ HUIZER LYDIA MARIANNA
Year of Publication 07.10.2022
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Year of Publication 07.10.2022
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METHODS OF DETERMINING CORRECTIONS FOR A PATTERNING PROCESS
YPMA ALEXANDER, WALLERBOS ERIK JOHANNES MARIA, ROELOFS WILLEM SEINE CHRISTIAN, DOVBUSH IRYNA, GROUWSTRA CEDRIC DESIRE, KUPERS MICHIEL, DELVIGNE ERIK HENRI ADRIAAN, HAUPTMANN MARC, DECKERS DAVID FRANS SIMON, KOU WEITIAN, GIOLLO MANUEL, CEKLI HAKKI ERGUN, VAN DER SANDEN STEFAN CORNELIS THEODORUS, VERGAIJ HUIZER LYDIA MARIANNA
Year of Publication 13.12.2021
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Year of Publication 13.12.2021
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METHODS OF DETERMINING CORRECTIONS FOR A PATTERNING PROCESS
YPMA ALEXANDER, WALLERBOS ERIK JOHANNES MARIA, ROELOFS WILLEM SEINE CHRISTIAN, DOVBUSH IRYNA, GROUWSTRA CEDRIC DESIRE, KUPERS MICHIEL, DELVIGNE ERIK HENRI ADRIAAN, HAUPTMANN MARC, DECKERS DAVID FRANS SIMON, KOU WEITIAN, GIOLLO MANUEL, CEKLI HAKKI ERGUN, VAN DER SANDEN STEFAN CORNELIS THEODORUS, VERGAIJ HUIZER LYDIA MARIANNA
Year of Publication 05.04.2021
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Year of Publication 05.04.2021
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패터닝 프로세스용 보정 결정 방법
YPMA ALEXANDER, WALLERBOS ERIK JOHANNES MARIA, ROELOFS WILLEM SEINE CHRISTIAN, DOVBUSH IRYNA, GROUWSTRA CEDRIC DESIRE, KUPERS MICHIEL, DELVIGNE ERIK HENRI ADRIAAN, HAUPTMANN MARC, DECKERS DAVID FRANS SIMON, KOU WEITIAN, GIOLLO MANUEL, CEKLI HAKKI ERGUN, VAN DER SANDEN STEFAN CORNELIS THEODORUS, VERGAIJ HUIZER LYDIA MARIANNA
Year of Publication 17.05.2019
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Year of Publication 17.05.2019
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Method for controlling a manufacturing apparatus and associated apparatuses
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Year of Publication 06.06.2023
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Year of Publication 06.06.2023
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Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus
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Year of Publication 10.10.2023
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Year of Publication 10.10.2023
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METHODS OF DETERMINING CORRECTIONS FOR A PATTERNING PROCESS
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Year of Publication 09.08.2023
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Year of Publication 09.08.2023
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METHODS OF DETERMINING CORRECTIONS FOR A PATTERNING PROCESS, DEVICE MANUFACTURING METHOD, CONTROL SYSTEM FOR A LITHOGRAPHIC APPARATUS AND LITHOGRAPHIC APPARATUS
Van Der Sanden, Stefan Cornelis Theodorus, Giollo, Manuel, Grouwstra, Cédric Désiré, Delvigne, Erick Henri Adriaan, Roelofs, Willem Seine Christian, Cekli, Hakki Ergün, Hauptmann, Marc, Kupers, Michiel, Vergaij-Huizer, Lydia Marianna, Wallerbos, Erick Johannes Maria, KOU, Weitian, Dovbush, Iryna, YPMA, Alexander, Deckers, David Frans Simon
Year of Publication 01.06.2023
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Year of Publication 01.06.2023
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Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus
Van Der Sanden, Stefan Cornelis Theodorus, Giollo, Manuel, Grouwstra, Cédric Désiré, Roelofs, Willem Seine Christian, Cekli, Hakki Ergün, Hauptmann, Marc, Delvigne, Erik Henri Adriaan, Kupers, Michiel, Vergaij-Huizer, Lydia Marianna, Kou, Weitian, Ypma, Alexander, Wallerbos, Erik Johannes Maria, Dovbush, Iryna, Deckers, David Frans Simon
Year of Publication 28.02.2023
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Year of Publication 28.02.2023
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METHOD FOR CONTROLLING A MANUFACTURING APPARATUS AND ASSOCIATED APPARATUSES
WILDENBERG, Jochem Sebastiaan, SMORENBERG, Pieter Gerardus Jacobus, WERKMAN, Roy, WEI, Xiuhong, RAJASEKHARAN, Bijoy, YAGUBIZADE, Hadi, VERGAIJ-HUIZER, Lydia Marianna, VAN DER HEIJDEN, Robertus Wilhelmus, VAN ITTERSUM, Ronald
Year of Publication 03.09.2020
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Year of Publication 03.09.2020
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