METHODS FOR DEPOSITING A TRANSITION METAL NITRIDE FILM ON A SUBSTRATE BY ATOMIC LAYER DEPOSITION AND RELATED DEPOSITION APPARATUS
MILLIGAN ROBERT BRENNAN, PETRO WILLIAM GEORGE, SHERO ERIC JAMES, LI LUPING, ALOKOZAI FRED, LI DONG, VERBAAS MELVIN, WANG HAO, WANG ERIC
Year of Publication 15.02.2024
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Year of Publication 15.02.2024
Patent
METHODS FOR DEPOSITING A TRANSITION METAL NITRIDE FILM ON A SUBSTRATE BY ATOMIC LAYER DEPOSITION AND RELATED DEPOSITION APPARATUS
MILLIGAN ROBERT BRENNAN, PETRO WILLIAM GEORGE, SHERO ERIC JAMES, LI LUPING, ALOKOZAI FRED, LI DONG, VERBAAS MELVIN, WANG HAO, WANG ERIC
Year of Publication 07.01.2019
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Year of Publication 07.01.2019
Patent