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Year of Publication 31.08.2020
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패터닝 프로세스에 관한 정보를 결정하는 방법, 측정 데이터의 오차를 감소시키는 방법, 계측 프로세스를 교정하는 방법, 및 계측 타겟을 선택하는 방법
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Year of Publication 30.06.2020
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Method of determining information about a patterning process, method of reducing error in measurement data, method of calibrating a metrology process, method of selecting metrology targets
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Year of Publication 14.03.2023
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METHOD OF DETERMINING INFORMATION ABOUT A PATTERNING PROCESS, METHOD OF REDUCING ERROR IN MEASUREMENT DATA, METHOD OF CALIBRATING A METROLOGY PROCESS, METHOD OF SELECTING METROLOGY TARGETS
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Year of Publication 19.08.2021
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Year of Publication 19.08.2021
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Year of Publication 08.08.2019
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Year of Publication 08.08.2019
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Method of determining information about a patterning process, method of reducing error in measurement data, method of calibrating a metrology process, method of selecting metrology targets
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Year of Publication 01.06.2021
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Year of Publication 01.06.2021
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METHOD OF DETERMINING INFORMATION ABOUT A PATTERNING PROCESS, METHOD OF REDUCING ERROR IN MEASUREMENT DATA, METHOD OF CALIBRATING A METROLOGY PROCESS, METHOD OF SELECTING METROLOGY TARGETS
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Year of Publication 13.06.2019
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Year of Publication 13.06.2019
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METHOD OF DETERMINING INFORMATION ABOUT A PATTERNING PROCESS, METHOD OF REDUCING ERROR IN MEASUREMENT DATA, METHOD OF CALIBRATING A METROLOGY PROCESS, METHOD OF SELECTING METROLOGY TARGETS
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Year of Publication 06.06.2019
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Year of Publication 06.06.2019
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METHOD OF OPTIMIZING A METROLOGY PROCESS
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Year of Publication 18.09.2020
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Year of Publication 18.09.2020
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METHOD OF DETERMINING INFORMATION ABOUT A PATTERNING PROCESS, METHOD OF REDUCING ERROR IN MEASUREMENT DATA, METHOD OF CALIBRATING A METROLOGY PROCESS, METHOD OF SELECTING METROLOGY TARGETS
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Year of Publication 17.07.2020
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Year of Publication 17.07.2020
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