계측 프로세스 최적화 방법
TSIATMAS ANAGNOSTIS, ZAAL MARTIJN MARIA, VENSELAAR JOANNES JITSE, FAGGINGER AUER BASTIAAN ONNE, REHMAN SAMEE UR, MEDVEDYEVA MARIYA VYACHESLAVIVNA, KONTOROUPI THALEIA
Year of Publication 31.08.2020
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Year of Publication 31.08.2020
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패터닝 프로세스에 관한 정보를 결정하는 방법, 측정 데이터의 오차를 감소시키는 방법, 계측 프로세스를 교정하는 방법, 및 계측 타겟을 선택하는 방법
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Year of Publication 30.06.2020
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Year of Publication 30.06.2020
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Method of determining information about a patterning process, method of reducing error in measurement data, method of calibrating a metrology process, method of selecting metrology targets
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Year of Publication 14.03.2023
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Year of Publication 14.03.2023
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METHOD OF DETERMINING INFORMATION ABOUT A PATTERNING PROCESS, METHOD OF REDUCING ERROR IN MEASUREMENT DATA, METHOD OF CALIBRATING A METROLOGY PROCESS, METHOD OF SELECTING METROLOGY TARGETS
VENSELAAR, Joannes Jitse, ZACHAROPOULOU, Thomai, TSIATMAS, Anagnostis, ZAAL, Martijn Maria, REHMAN, Samee Ur, SANGUINETTI, Gonzalo Roberto, HINNEN, Paul Christiaan, WEISS, Nicolas Mauricio, Marie VAESSEN, Jean-Pierre Agnes Henricus
Year of Publication 19.08.2021
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Year of Publication 19.08.2021
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Method of determining information about a patterning process, method of reducing error in measurement data, method of calibrating a metrology process, method of selecting metrology targets
Rehman, Samee Ur, Zacharopoulou, Thomai, Weiss, Nicolas Mauricio, Tsiatmas, Anagnostis, Hinnen, Paul Christiaan, Sanguinetti, Gonzalo Roberto, Zaal, Martijn Maria, Venselaar, Joannes Jitse, Vaessen, Jean-Pierre Agnes Henricus Marie
Year of Publication 01.06.2021
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Year of Publication 01.06.2021
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METHOD OF DETERMINING INFORMATION ABOUT A PATTERNING PROCESS, METHOD OF REDUCING ERROR IN MEASUREMENT DATA, METHOD OF CALIBRATING A METROLOGY PROCESS, METHOD OF SELECTING METROLOGY TARGETS
VENSELAAR, Joannes Jitse, Rehman, Samee Ur, Zacharopoulou, Thomai, Weiss, Nicolas Mauricio, Tsiatmas, Anagnostis, Hinnen, Paul Christiaan, Sanguinetti, Gonzalo Roberto, Zaal, Martijn Maria, Vaessen, Jean-Pierre Agnes Henricus Marie
Year of Publication 06.06.2019
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Year of Publication 06.06.2019
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Method of determining information about a patterning process, method of reducing error in measurement data, method of calibrating a metrology process, method of selecting metrology targets
REHMAN, SAMEE UR, ZAAL, MARTIJN MARIA, TSIATMAS, ANAGNOSTIS, HINNEN, PAUL CHRISTIAAN, VAESSEN, JEAN-PIERRE AGNES HENRICUS MARIE, SANGUINETTI, GONZALO ROBERTO, VENSELAAR, JOANNES JITSE, WEISS, NICOLAS MAURICIO, ZACHAROPOULOU, THOMAI
Year of Publication 01.12.2020
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Year of Publication 01.12.2020
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Method of determining information about a patterning process, method of reducing error in measurement data, method of calibrating a metrology process, method of selecting metrology targets
REHMAN, SAMEE UR, ZAAL, MARTIJN MARIA, TSIATMAS, ANAGNOSTIS, HINNEN, PAUL CHRISTIAAN, VAESSEN, JEAN-PIERRE AGNES HENRICUS MARIE, SANGUINETTI, GONZALO ROBERTO, VENSELAAR, JOANNES JITSE, WEISS, NICOLAS MAURICIO, ZACHAROPOULOU, THOMAI
Year of Publication 16.09.2019
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Year of Publication 16.09.2019
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