베어링 디바이스, 자기 중력 보상기, 진동 분리 시스템, 리소그래피 장치, 네거티브 강성을 갖는 중력 보상기를 제어하는 방법, 및 스프링
FISCHER OLOF MARTINUS JOSEPHUS, VENNAT ERIC PIERRE YVES, WIJCKMANS MAURICE WILLEM JOZEF ETIENNE, HUIZINGA THEODORUS MATTHEUS JOANNUS MARIA, BUTLER HANS, HOOGENDAM CHRISTIAAN ALEXANDER, KIMMAN MAARTEN HARTGER, ROVERS JOHANNES MARINUS MARIA
Year of Publication 01.11.2019
Get full text
Year of Publication 01.11.2019
Patent
Bearing device, magnetic gravity compensator, vibration isolation system, lithographic apparatus, and method to control a gravity compensator having a negative stiffness
Huizinga, Theodorus Mattheus Joannus Maria, Wijckmans, Maurice Willem Jozef Etienne, Butler, Hans, Fischer, Olof Martinus Josephus, Hoogendam, Christiaan Alexander, Rovers, Johannes Marinus Maria, Vennat, Eric Pierre-Yves, Kimman, Maarten Hartger
Year of Publication 08.06.2021
Get full text
Year of Publication 08.06.2021
Patent
BEARING DEVICE, MAGNETIC GRAVITY COMPENSATOR, VIBRATION ISOLATION SYSTEM, LITHOGRAPHIC APPARATUS, METHOD TO CONTROL A GRAVITY COMPENSATOR HAVING A NEGATIVE STIFFNESS, AND SPRING
FISCHER, Olof Martinus Josephus, ROVERS, Johannes Marinus Maria, WIJCKMANS, Maurice Willem Jozef Etiënne, KIMMAN, Maarten Hartger, HOOGENDAM, Christiaan Alexander, BUTLER, Hans, HUIZINGA, Theodorus Mattheus Joannus Maria, VENNAT, Eric Pierre-Yves
Year of Publication 13.02.2020
Get full text
Year of Publication 13.02.2020
Patent
BEARING DEVICE, MAGNETIC GRAVITY COMPENSATOR, VIBRATION ISOLATION SYSTEM, LITHOGRAPHIC APPARATUS, METHOD TO CONTROL A GRAVITY COMPENSATOR HAVING A NEGATIVE STIFFNESS, AND SPRING
FISCHER, Olof Martinus Josephus, ROVERS, Johannes Marinus Maria, WIJCKMANS, Maurice Willem Jozef Etiënne, KIMMAN, Maarten Hartger, HOOGENDAM, Christiaan Alexander, BUTLER, Hans, HUIZINGA, Theodorus Mattheus Joannus Maria, VENNAT, Eric Pierre-Yves
Year of Publication 22.01.2020
Get full text
Year of Publication 22.01.2020
Patent
Bearing device, magnetic gravity compensator, vibration isolation system, lithographic apparatus, method to control a gravity compensator having a negative stiffness, and spring
ERIC PIERRE-YVES VENNAT, CHRISTIAAN ALEXANDER HOOGENDAM, OLOF MARTINUS JOSEPHUS FISCHER, JOHANNES MARINUS MARIA ROVERS, MAURICE WILLEM JOZEF ETIËNNE WIJCKMANS, MAARTEN HARTGER KIMMAN, THEODORUS MATTHEUS JOANNUS MARIA HUIZINGA, HANS BUTLER
Year of Publication 19.09.2018
Get full text
Year of Publication 19.09.2018
Patent
Bearing device, magnetic gravity compensator, vibration isolation system, lithographic apparatus, method to control a gravity compensator having a negative stiffness, and spring
ROVERS, JOHANNES MARINUS MARIA, WIJCKMANS, MAURICE WILLEM JOZEF ETIENNE, HUIZINGA, THEODORUS MATTHEUS JOANNUS MARIA, VENNAT, ERIC PIERRE-YVES, FISCHER, OLOF MARTINUS JOSEPHUS, BUTLER, HANS, HOOGENDAM, CHRISTIAAN ALEXANDER, KIMMAN, MAARTEN HARTGER
Year of Publication 01.07.2019
Get full text
Year of Publication 01.07.2019
Patent
Bearing device, magnetic gravity compensator, vibration isolation system, lithographic apparatus, method to control a gravity compensator having a negative stiffness, and spring
ROVERS, JOHANNES MARINUS MARIA, WIJCKMANS, MAURICE WILLEM JOZEF ETIENNE, HUIZINGA, THEODORUS MATTHEUS JOANNUS MARIA, VENNAT, ERIC PIERRE-YVES, FISCHER, OLOF MARTINUS JOSEPHUS, BUTLER, HANS, HOOGENDAM, CHRISTIAAN ALEXANDER, KIMMAN, MAARTEN HARTGER
Year of Publication 01.11.2018
Get full text
Year of Publication 01.11.2018
Patent