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CLEANING AGENT COMPOSITION FOR POST-CMP STEP
by
TONOYA, Masashi
,
MIZUSHIMA, Chiho
,
HARIGAE, Takako
,
FUJII, Yudai
,
BABU, Suryadevara V
,
VEGI, Sri Siva Rama Krishna Hanup
,
VENKATARONAPPA
,
Gollahalli Arunkumar
,
SEO, Jihoon
,
OTHMAN, Ali
Year of Publication
12.01.2023
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Cleaning agent composition for post-CMP step
by
BABU, SURYADEVARA V
,
VENKATARONAPPA
,
GOLLAHALLI ARUNKUMAR
,
FUJII, YUDAI
,
TONOYA, MASASHI
,
VEGI, SRI SIVA RAMA KRISHNA HANUP
,
SEO, JI-HOON
,
MIZUSHIMA, CHIHO
,
OTHMAN, ALI
,
HARIGAE, TAKAKO
Year of Publication
16.03.2023
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Patent
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animal and vegetable oils, fats, fatty substances and waxes
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basic electric elements
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