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"VELTROP, ROBERT G"
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"VELTROP, ROBERT G"
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PLASMA GENERATING DEVICE
by
CHEN JIAN J
,
WICKER THOMAS E
,
VELTROP ROBERT G
Year of Publication
28.07.2011
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PLASMA GENERATING DEVICE
by
CHEN JIAN J
,
WICKER THOMAS E
,
VELTROP ROBERT G
Year of Publication
07.01.2010
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Critical dimension control for integrated circuits
by
Abatchev, Mirzafer K
,
Hwang, David K
,
Veltrop
,
Robert G
Year of Publication
21.07.2009
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Critical dimension control for integrated circuits
by
HWANG DAVID K
,
ABATCHEV MIRZAFER K
,
VELTROP ROBERT G
Year of Publication
21.07.2009
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MULTIPLE COIL ANTENNA FOR INDUCTIVELY-COUPLED PLASMA GENERATION SYSTEMS
by
VELTROP
,
ROBERT
,
G
,
WICKER, THOMAS, E
,
CHEN, JIAN, J
Year of Publication
13.08.2008
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INDUKTIVPLASMA-BEHANDLUNGSVORRICHTUNG MIT EINEM STROMSENSOR FÜR PLASMAERREGERSPULE
by
CHEN, JIAN J
,
WICKER, THOMAS E
,
VELTROP
,
ROBERT G
Year of Publication
25.10.2007
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Critical dimension control for integrated circuits
by
Abatchev, Mirzafer K
,
Hwang, David K
,
Veltrop
,
Robert G
Year of Publication
18.09.2007
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Critical dimension control for integrated circuits
by
HWANG DAVID K
,
ABATCHEV MIRZAFER K
,
VELTROP ROBERT G
Year of Publication
18.09.2007
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INDUCTIVE PLASMA PROCESSOR INCLUDING CURRENT SENSOR FOR PLASMA EXCITATION COIL
by
VELTROP
,
ROBERT
,
G
,
WICKER, THOMAS, E
,
CHEN, JIAN, J
Year of Publication
13.06.2007
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Inductive plasma processor having coil with plural windings and method of controlling plasma density
by
CHEN, JIAN J
,
WICKER, THOMAS E
,
VELTROP
,
ROBERT G
Year of Publication
11.03.2007
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Critical dimension control for integrated circuits
by
HWANG DAVID K
,
ABATCHEV MIRZAFER K
,
VELTROP ROBERT G
Year of Publication
30.11.2006
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Inductive plasma processor having coil with plural windings and method of controlling plasma density
by
CHEN JIAN J
,
WICKER THOMAS E
,
VELTROP ROBERT G
Year of Publication
29.08.2006
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Inductive plasma processor having coil with plural windings and method of controlling plasma density
by
Chen, Jian J
,
Veltrop
,
Robert G
,
Wicker, Thomas E
Year of Publication
29.08.2006
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Inductive plasma processor including current sensor for plasma excitation coil
by
CHEN, JIAN J
,
WICKER, THOMAS E
,
VELTROP
,
ROBERT G
Year of Publication
21.05.2006
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Critical dimension control for integrated circuits
by
HWANG DAVID K
,
ABATCHEV MIRZAFER K
,
VELTROP ROBERT G
Year of Publication
02.03.2006
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Inductive plasma processor method
by
CHEN JIAN J
,
WICKER THOMAS E
,
VELTROP ROBERT G
Year of Publication
11.03.2004
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INDUCTIVE PLASMA PROCESSOR INCLUDING CURRENT SENSOR FOR PLASMA EXCITATION COIL
by
VELTROP
,
ROBERT
,
G
,
WICKER, THOMAS, E
,
CHEN, JIAN, J
Year of Publication
02.01.2004
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Inductive plasma processor including current sensor for plasma excitation coil
by
Veltrop
,
Robert G
,
Chen, Jian J
,
Wicker, Thomas E
Year of Publication
24.06.2003
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Inductive plasma processor including current sensor for plasma excitation coil
by
CHEN JIAN J
,
WICKER THOMAS E
,
VELTROP ROBERT G
Year of Publication
24.06.2003
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Stacked RF excitation coil for inductive plasma processor
by
CHEN, JIAN J
,
WICKER, THOMAS E
,
VELTROP
,
ROBERT G
Year of Publication
01.06.2003
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