Dielectric materials for advanced VLSI and ULSI technologies
Obeng, Yaw S., Steiner, Kurt G., Velaga, Ankineedu N., Pal, Chien-Shing
Published in AT&T Technical Journal (01.05.1994)
Published in AT&T Technical Journal (01.05.1994)
Get full text
Journal Article
METHOD AND APPARATUS FOR THE FORMATION OF DIELECTRIC LAYERS
SAHIN, TURGUT, NARWANKAR, PRAVIN K, URDAHL, RANDALL S, VELAGA, ANKINEEDU, LIU, PATRICIA
Year of Publication 24.01.2002
Get full text
Year of Publication 24.01.2002
Patent
METHOD AND APPARATUS FOR THE FORMATION OF DIELECTRIC LAYERS
URDAHL RANDALL S, NARWANKAR PRAVIN K, VELAGA ANKINEEDU, SAHIN TURGUT, LIU PATRICIA
Year of Publication 24.01.2002
Get full text
Year of Publication 24.01.2002
Patent
A METHOD AND APPARATUS FOR THE FORMATION OF DIELECTRIC LAYERS
VELAGA, ANKINEEDU, LIU, PATRICIA, NARWANKAR, PRAVIN, K, URDAHL, RANDALL, S, SAHIN, TURGUT
Year of Publication 25.04.2001
Get full text
Year of Publication 25.04.2001
Patent
Method and apparatus for forming a titanium doped tantalum pentaoxide dielectric layer using CVD
URDAHL RANDALL S, NARWANKAR PRAVIN K, VELAGA ANKINEEDU, SAHIN TURGUT, LIU PATRICIA
Year of Publication 17.04.2001
Get full text
Year of Publication 17.04.2001
Patent
A METHOD AND APPARATUS FOR FORMING A TI DOPED TA2O5 LAYER
VELAGA, ANKINEEDU, LIU, PATRICIA, NARWANKAR, PRAVIN, K, URDAHL, RANDALL, S, SAHIN, TURGUT
Year of Publication 28.03.2001
Get full text
Year of Publication 28.03.2001
Patent
A METHOD AND APPARATUS FOR FORMING A TI DOPED TA205 LAYER
VELAGA, ANKINEEDU, LIU, PATRICIA, NARWANKAR, PRAVIN, K, URDAHL, RANDALL, S, SAHIN, TURGUT
Year of Publication 16.12.1999
Get full text
Year of Publication 16.12.1999
Patent
A METHOD AND APPARATUS FOR THE FORMATION OF DIELECTRIC LAYERS
VELAGA, ANKINEEDU, LIU, PATRICIA, NARWANKAR, PRAVIN, K, URDAHL, RANDALL, S, SAHIN, TURGUT
Year of Publication 16.12.1999
Get full text
Year of Publication 16.12.1999
Patent
Method of integrated circuit manufacturing using deposited oxide
VELAGA, ANKINEEDU, MANOCHA, AJIT SINGH, SINGH RANA, VIRENDRA VIR, ROBERTS, JAMES FRANKLIN
Year of Publication 05.04.1995
Get full text
Year of Publication 05.04.1995
Patent
Method of integrated circuit manufacturing using deposited oxide
ROBERTS; JAMES F, MANOCHA; AJIT S, VELAGA; ANKINEEDU, RANA; VIRENDRA V. S
Year of Publication 12.07.1994
Get full text
Year of Publication 12.07.1994
Patent