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Year of Publication 01.02.2021
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Year of Publication 01.02.2021
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Year of Publication 28.07.2021
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Year of Publication 28.07.2021
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패터닝된 그리고 패터닝되지 않은 기판들 상의 순차적 증착 및 증착된 막의 고주파 플라즈마 처리
YU HANG, LI CHANGLING, BALSEANU MIHAELA A, SALY MARK JOSEPH, KAMATH SANJAY G, DURAND WILLIAM JOHN, MALLICK ABHIJIT B, CHUA THAI CHENG, KRAUS PHILIP ALLAN, VATS VINAYAK VEER, KALUTARAGE LAKMAL CHARIDU, PADHI DEENESH
Year of Publication 06.07.2021
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Year of Publication 06.07.2021
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Multi-region diffusion barrier containing titanium, silicon and nitrogen
Karim, M. Ziaul, Mukherjee, Niloy, Vats, Vinayak Veer, Choi, Bo Seon, Rathi, Somilkumar J
Year of Publication 26.03.2024
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Year of Publication 26.03.2024
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Pulsed plasma deposition etch step coverage improvement
Yu, Hang, Amico, Gregory M, Vats, Vinayak Veer, Kamath, Sanjay G, Padhi, Deenesh, Li, Changling
Year of Publication 16.03.2021
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Year of Publication 16.03.2021
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Process development visualization tool
Sin, Garrett Ho-Yee, Yu, Hang, Pai, Heng-Cheng, Bhatia, Sidharth, Vats, Vinayak Veer, Nambiar, Pramod, Padhi, Deenesh, Kamath, Sanjay
Year of Publication 26.10.2021
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Year of Publication 26.10.2021
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PULSED PLASMA DEPOSITION ETCH STEP COVERAGE IMPROVEMENT
YU, Hang, AMICO, Gregory M, KAMATH, Sanjay G, VATS, Vinayak Veer, LI, Changling, PADHI, Deenesh
Year of Publication 28.01.2021
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Year of Publication 28.01.2021
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PROCESS DEVELOPMENT VISUALIZATION TOOL
Sin, Garrett Ho-Yee, Yu, Hang, Pai, Heng-Cheng, Bhatia, Sidharth, Vats, Vinayak Veer, Nambiar, Pramod, Padhi, Deenesh, Kamath, Sanjay
Year of Publication 25.06.2020
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Year of Publication 25.06.2020
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Sequential deposition and high frequency plasma treatment of deposited film on patterned and un-patterned substrates
Saly, Mark Joseph, Mallick, Abhijit B, Yu, Hang, Balseanu, Mihaela A, Kraus, Philip Allan, Vats, Vinayak Veer, Kamath, Sanjay G, Durand, William John, Kalutarage, Lakmal Charidu, Li, Changling, Padhi, Deenesh, Chua, Thai Cheng
Year of Publication 04.01.2022
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Year of Publication 04.01.2022
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PULSED PLASMA DEPOSITION ETCH STEP COVERAGE IMPROVEMENT
YU, Hang, AMICO, Gregory M, KAMATH, Sanjay G, VATS, Vinayak Veer, LI, Changling, PADHI, Deenesh
Year of Publication 26.12.2019
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Year of Publication 26.12.2019
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PULSED PLASMA DEPOSITION ETCH STEP COVERAGE IMPROVEMENT
YU, Hang, AMICO, Gregory M, KAMATH, Sanjay G, VATS, Vinayak Veer, LI, Changling, PADHI, Deenesh
Year of Publication 19.12.2019
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Year of Publication 19.12.2019
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MULTI-REGION DIFFUSION BARRIER CONTAINING TITANIUM, SILICON AND NITROGEN
Karim, M. Ziaul, Mukherjee, Niloy, Vats, Vinayak Veer, Choi, Bo Seon, Rathi, Somilkumar J
Year of Publication 06.12.2018
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Year of Publication 06.12.2018
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PROCESS DEVELOPMENT VISUALIZATION TOOL
YU, Hang, BHATIA, Sidharth, KAMATH, Sanjay, VATS, Vinayak Veer, NAMBIAR, Pramod, PADHI, Deenesh, SIN, Garrett Ho-Yee, PAI, Heng-Cheng
Year of Publication 25.06.2020
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Year of Publication 25.06.2020
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