Characterization and optimization of magnetron sputtered Sc/Si multilayers for extreme ultraviolet optics
GAUTIER, J, DELMOTTE, F, BRIDOU, F, RAVET, M. F, VARNIERE, F, ROULLIAY, M, JEROME, A, VICKRIDGE, I
Published in Applied physics. A, Materials science & processing (01.09.2007)
Published in Applied physics. A, Materials science & processing (01.09.2007)
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Pt electrode investigation and electrical properties of RF magnetron sputtered Pb(Zr,Ti)O3
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Conference Proceeding
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Stresses, microstructure and resistivity of thin tungsten films deposited by RF magnetron sputtering
Hugon, M.C., Varniere, F., Agius, B., Froment, M., Arena, C., Bessot, J.
Published in Applied surface science (01.09.1989)
Published in Applied surface science (01.09.1989)
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18 O study of the oxidation of reactively sputtered Ti 1− x Al x N barrier
Hugon, M. C., Varniere, F., Letendu, F., Agius, B., Vickridge, I., Kingon, A. I.
Published in Journal of materials research (01.09.2001)
Published in Journal of materials research (01.09.2001)
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Journal Article
18O study of the oxidation of reactively sputtered Ti1−xAlxN barrier
Hugon, M. C., Varniere, F., Letendu, F., Agius, B., Vickridge, I., Kingon, A. I.
Published in Journal of materials research (01.09.2001)
Published in Journal of materials research (01.09.2001)
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Journal Article
STUDY OF THE OXIDATION OF REACTIVELY SPUTTERED Ti1-xAlxN BARRIER
Hugon, M C, Varniere, F, Letendu, F, Agius, B, Vickridge, I, Kingon, A I
Published in Journal of materials research (01.01.2001)
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Published in Journal of materials research (01.01.2001)
Journal Article
X-ray-ultraviolet beam splitters for the Michelson interferometer
Delmotte, Franck, Ravet, Marie-Françoise, Bridou, Françoise, Varnière, Françoise, Zeitoun, Philippe, Hubert, Sébastien, Vanbostal, Laurent, Soullie, Gérard
Published in Applied optics (2004) (01.10.2002)
Published in Applied optics (2004) (01.10.2002)
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