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Year of Publication 03.10.2013
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Year of Publication 16.05.2013
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Year of Publication 13.11.2012
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Year of Publication 13.11.2012
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Year of Publication 13.11.2012
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Year of Publication 13.11.2012
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Year of Publication 29.05.2018
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Year of Publication 25.04.2017
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Year of Publication 25.04.2017
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Year of Publication 16.05.2013
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Year of Publication 16.05.2013
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A RADIATION SOURCE
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Year of Publication 21.04.2016
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Optical element mount for lithographic apparatus
JACOB KLEIJN, RUUD BEERENS, ALEXANDER STRUYCKEN, HENRICUS TEGENBOSCH, IVO VANDERHALLEN
Year of Publication 22.01.2010
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Year of Publication 22.01.2010
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RADIATION COLLECTOR, RADIATION SOURCE AND LITHOGRAPHIC APPARATUS
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Year of Publication 02.10.2014
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Year of Publication 02.10.2014
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Year of Publication 28.03.2013
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Year of Publication 28.03.2013
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Year of Publication 25.03.2013
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Year of Publication 25.03.2013
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OPTICAL ELEMENT MOUNT FOR LITHOGRAPHIC APPARATUS
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Year of Publication 25.08.2011
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Year of Publication 25.08.2011
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Year of Publication 13.01.2014
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Year of Publication 13.01.2014
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Radiation Collector, Radiation Source and Lithographic Apparatus
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Year of Publication 28.01.2016
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Year of Publication 11.09.2014
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Year of Publication 11.09.2014
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A mount configured to mount an optical element in a module for a lithographic apparatus, a module for a lithographic apparatus, and a resilient member constructed and arranged to exert a force on a perimeter of an optical element of a module of a lithogr
BEERENS, RUUD ANTONIUS CATHARINA MARIA, VANDERHALLEN, IVO, KLEIJN, JACOB, STRUYCKEN, ALEXANDER MATTHIJS, TEGENBOSCH, HENRICUS GERARDUS
Year of Publication 21.09.2014
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Year of Publication 21.09.2014
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Optical element mount for lithographic apparatus
VANDERHALLEN IVO, TEGENBOSCH HENRICUS GERARDUS, BEERENS RUUD ANTONIUS CATHARINA MARIA, STRUYCKEN ALEXANDER MATTHIJS, KLEIJN JACOB
Year of Publication 20.08.2014
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Year of Publication 20.08.2014
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