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APPARATUS AND METHOD FOR BACKSIDE PROTECTION DURING SUBSTRATE PROCESSING
by
THOMAS, MICHAEL E
,
BROADBENT, ELIOT K
,
VANDE VEN
,
EVERHARDUS P
Year of Publication
23.05.1997
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Patent
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chemistry
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medicine
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sciences
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after-treatment of single crystals or a homogeneouspolycrystalline material with defined structure
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apparatus therefor
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basic electric elements
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chemical surface treatment
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chemistry
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coating material with metallic material
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esp@cenet
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