Fabrication and characterization of micromachined high-frequency tonpilz transducers derived by PZT thick films
Qifa Zhou, Cannata, J.M., Meyer, R.J., Van Tol, D.J., Tadigadapa, S., Hughes, W.J., Shung, K.K., Trolier-McKinstry, S.
Published in IEEE transactions on ultrasonics, ferroelectrics, and frequency control (01.03.2005)
Published in IEEE transactions on ultrasonics, ferroelectrics, and frequency control (01.03.2005)
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