방사선 빔을 컨디셔닝하고 지향하기 위한 장치
DER KINDEREN RONNY, VAN SCHOOT JAN BERNARD PLECHELMUS, VAN SLUISVELD WOUTERUS JOZEPHUS JOHANNES
Year of Publication 12.01.2024
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Year of Publication 12.01.2024
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APPARATUS FOR CONDITIONING AND DIRECTING A RADIATION BEAM
VAN SCHOOT, Jan Bernard Plechelmus, VAN SLUISVELD, Wouterus Jozephus Johannes, DER KINDEREN, Ronny
Year of Publication 16.11.2022
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Year of Publication 16.11.2022
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Apparatus for conditioning and directing a radiation beam
VAN SCHOOT, JAN BERNARD PLECHELMUS, DER KINDEREN, RONNY, VAN SLUISVELD, WOUTERUS JOZEPHUS JOHANNES
Year of Publication 01.01.2023
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Year of Publication 01.01.2023
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METHOD OF PERFORMANCE TESTING WORKING PARAMETERS OF A FLUID HANDLING STRUCTURE AND A METHOD OF DETECTING LOSS OF IMMERSION LIQUID FROM A FLUID HANDING STRUCTURE IN AN IMMERSION LITHOGRAPHIC APPARATUS
POLET, Theodoras Wilhelmus, GATTOBIGIO, Giovanni Luca, BECKERS, Johan Franciscus Maria, VANGHELUWE, Rik, VAN GILS, Mike Paulus Johannes, VAN SLUISVELD, Wouterus Jozephus Johannes, KOX, Ronald Frank, BANERJEE, Nirupam, EUMMELEN, Erik Henricus Egidius Catharina, ROPS, Cornelius Maria
Year of Publication 14.05.2020
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Year of Publication 14.05.2020
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A Method of Performance Testing Working Parameters of a Fluid Handling Structure and A Method of Detecting Loss of Immersion Liquid from a Fluid Handing Structure in an Immersion Lithographic Apparatus
MIKE PAULUS JOHANNES VAN GILS, THEODORUS WILHELMUS POLET, JOHAN FRANCISCUS MARIA BECKERS, CORNELIUS MARIA ROPS, WOUTERUS JOZEPHUS JOHANNES VAN SLUISVELD, NIRUPAM BANERJEE, ERIK HENRICUS EGIDIUS CATHARINA EUMMELEN, RIK TEODOOR VANGHELUWE, GIOVANNI LUCA GATTOBIGIO, RONALD FRANK KOX
Year of Publication 24.10.2018
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Year of Publication 24.10.2018
Patent
METHOD OF PERFORMANCE TESTING A FLUID HANDLING STRUCTURE
MIKE PAULUS JOHANNES VAN GILS, THEODORUS WILHELMUS POLET, JOHAN FRANCISCUS MARIA BECKERS, CORNELIUS MARIA ROPS, WOUTERUS JOZEPHUS JOHANNES VAN SLUISVELD, NIRUPAM BANERJEE, ERIK HENRICUS EGIDIUS CATHARINA EUMMELEN, RIK TEODOOR VANGHELUWE, GIOVANNI LUCA GATTOBIGIO, RONALD FRANK KOX
Year of Publication 29.11.2019
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Year of Publication 29.11.2019
Patent