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Year of Publication 03.07.2019
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Year of Publication 03.07.2019
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METHODS APPARATUS FOR OBTAINING DIAGNOSTIC INFORMATION RELATING TO A LITHOGRAPHIC MANUFACTURING PROCESS LITHOGRAPHIC PROCESSING SYSTEM INCLUDING DIAGNOSTIC APPARATUS
HAUPTMANN MARC, DAVIES DYLAN JOHN DAVID, TSUGAMA NAOKO, VIEYRA SALAS JORGE ALBERTO, JANSSEN PAUL, JANSSEN EDWIN JOHANNES MARIA, HOEKERD KORNELIS TIJMEN, BRULS RICHARD JOSEPH, VAN DER WILK RONALD, VAN SCHIJNDEL ANTONIUS HUBERTUS, VAN DEN OEVER PETRUS JOHANNES
Year of Publication 26.07.2017
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Year of Publication 26.07.2017
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Methods and apparatus for obtaining diagnostic information relating to a lithographic manufacturing process
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Year of Publication 07.04.2020
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Year of Publication 07.04.2020
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METHODS & APPARATUS FOR OBTAINING DIAGNOSTIC INFORMATION RELATING TO A LITHOGRAPHIC MANUFACTURING PROCESS
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Year of Publication 18.07.2019
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Year of Publication 18.07.2019
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Method and apparatus for obtaining diagnostic information relating to a lithographic manufacturing process, lithographic processing system including diagnostic apparatus
Van Den Oever, Petrus Johannes, Tsugama, Naoko, Janssen, Paul, Bruls, Richard Joseph, Hauptmann, Marc, Vieyra Salas, Jorge Alberto, Hoekerd, Kornelis Tijmen, Janssen, Edwin Johannes Maria, Van Der Wilk, Ronald, Van Schijndel, Antonius Hubertus, Davies, Dylan John David
Year of Publication 26.03.2019
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Year of Publication 26.03.2019
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DEVICE AND METHOD FOR GENERATING A PLASMA DISCHARGE FOR PATTERNING THE SURFACE OF A SUBSTRATE
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Year of Publication 31.01.2018
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Year of Publication 31.01.2018
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METHOD & APPARATUS FOR OBTAINING DIAGNOSTIC INFORMATION RELATING TO A LITHOGRAPHIC MANUFACTURING PROCESS, LITHOGRAPHIC PROCESSING SYSTEM INCLUDING DIAGNOSTIC APPARATUS
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Year of Publication 21.12.2017
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Year of Publication 21.12.2017
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METHODS & APPARATUS FOR OBTAINING DIAGNOSTIC INFORMATION RELATING TO A LITHOGRAPHIC MANUFACTURING PROCESS, LITHOGRAPHIC PROCESSING SYSTEM INCLUDING DIAGNOSTIC APPARATUS
TSUGAMA, NAOKO, DAVIES, DYLAN,JOHN,DAVID, VAN DEN OEVER, PETRUS, JOHANNES, BRULS, RICHARD, JOSEPH, VAN DER WILK, RONALD, HOEKERD, KORNELIS, TIJMEN, HAUPTMANN, MARC, JANSSEN, PAUL, VAN SCHIJNDEL, ANTONIUS, HUBERTUS, JANSSEN, EDWIN, JOHANNES, MARIA, VIEYRA SALAS, JORGE, ALBERTO
Year of Publication 09.06.2016
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Year of Publication 09.06.2016
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Device and method for generating a plasma discharge for patterning the surface of a substrate
HUIJBREGTS LAURENTIA JOHANNA, DE HAAN HUGO ANTON MARIE, VAN HIJNINGEN NICOLAAS CORNELIS JOSEPHUS, VAN SCHIJNDEL ANTONIUS HUBERTUS, BLOM PAULUS PETRUS MARIA, STEVENS ALQUIN ALPHONS ELISABETH, TE SLIGTE EDWIN, HUISKAMP TOM
Year of Publication 13.10.2015
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Year of Publication 13.10.2015
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DEVICE AND METHOD FOR GENERATING A PLASMA DISCHARGE FOR PATTERNING THE SURFACE OF A SUBSTRATE
HUIJBREGTS LAURENTIA JOHANNA, DE HAAN HUGO ANTON MARIE, VAN HIJNINGEN NICOLAAS CORNELIS JOSEPHUS, VAN SCHIJNDEL ANTONIUS HUBERTUS, BLOM PAULUS PETRUS MARIA, STEVENS ALQUIN ALPHONS ELISABETH, TE SLIGTE EDWIN, HUISKAMP TOM
Year of Publication 15.08.2013
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Year of Publication 15.08.2013
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DEVICE AND METHOD FOR GENERATING A PLASMA DISCHARGE FOR PATTERNING THE SURFACE OF A SUBSTRATE
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Year of Publication 26.12.2012
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Year of Publication 26.12.2012
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DEVICE AND METHOD FOR GENERATING A PLASMA DISCHARGE FOR PATTERNING THE SURFACE OF A SUBSTRATE
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Year of Publication 25.08.2011
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Year of Publication 25.08.2011
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Methods & apparatus for obtaining diagnostic information relating to a lithographic manufacturing process, lithographic processing system including diagnostic apparatus
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Year of Publication 11.07.2017
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Year of Publication 11.07.2017
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Methods & apparatus for obtaining diagnostic information relating to a lithographic manufacturing process, lithographic processing system including diagnostic apparatus
TSUGAMA, NAOKO, VIEYRA SALAS, JORGE ALBERTO, VAN DER WILK, RONALD, JANSSEN, EDWIN JOHANNES MARIA, VAN DEN OEVER, PETRUS JOHANNES, VAN SCHIJNDEL, ANTONIUS HUBERTUS, BRULS, RICHARD JOSEPH, HAUPTMANN, MARC, HOEKERD, KORNELIS TIJMEN, JANSSEN, PAUL, DAVIES, DYLAN JOHN DAVID
Year of Publication 16.06.2016
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Year of Publication 16.06.2016
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Device and method for generating a plasma discharge for patterning the surface of a substrate
HUIJBREGTS LAURENTIA JOHANNA, DE HAAN HUGO ANTON MARIE, VAN HIJNINGEN NICOLAAS CORNELIS JOSEPHUS, VAN SCHIJNDEL ANTONIUS HUBERTUS, BLOM PAULUS PETRUS MARIA, STEVENS ALQUIN ALPHONS ELISABETH, TE SLIGTE EDWIN, HUISKAMP TOM
Year of Publication 12.12.2012
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Year of Publication 12.12.2012
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