RESIST COMPOSITIONS
WUISTER SANDER FREDERIK, VOORTHUIJZEN WILLEM PIETER, VAN LARE MARIE CLAIRE
Year of Publication 07.03.2023
Get full text
Year of Publication 07.03.2023
Patent
리소그래피 장치에서 패턴 천이를 감소시키기 위한 시스템 및 방법
HAGEMAN JOOST CYRILLUS LAMBERT, VAN DER LAAN HANS, VAN LARE MARIE-CLAIRE
Year of Publication 29.07.2024
Get full text
Year of Publication 29.07.2024
Patent
머신 러닝을 사용한 웨이퍼 검사용 예측 이미지 생성 시스템 및 방법
MASLOW MARK JOHN, PISARENCO MAXIM, BATISTAKIS CHRYSOSTOMOS, VAN LARE MARIE CLAIRE, MIDDLEBROOKS SCOTT ANDERSON
Year of Publication 26.04.2022
Get full text
Year of Publication 26.04.2022
Patent
반도체 제조 공정에서 증착 모델을 적용하는 방법
ZHANG HUAICHEN, PISARENCO MAXIM, VAN LARE MARIE CLAIRE, VAN DER SCHAAR MAURITS
Year of Publication 10.02.2022
Get full text
Year of Publication 10.02.2022
Patent
레지스트 조성물
WUISTER SANDER FREDERIK, VOORTHUIJZEN WILLEM PIETER, VAN LARE MARIE CLAIRE
Year of Publication 30.01.2019
Get full text
Year of Publication 30.01.2019
Patent
패터닝 디바이스 및 그 사용 방법
TIMMERMANS FRANK JAN, MC NAMARA JOHN MARTIN, FINDERS JOZEF MARIA, WITTEBROOD FRISO, VAN LARE MARIE CLAIRE
Year of Publication 14.10.2021
Get full text
Year of Publication 14.10.2021
Patent
결함 기반의 프로세스 윈도우에 기초하여 시뮬레이션 프로세스를 캘리브레이팅하기 위한 방법
KOOIMAN MARLEEN, VAN INGEN SCHENAU KOENRAAD, WANG FUMING, COLINA LUIS ALBERTO COLINA SANTAMARIA, DILLEN HERMANUS ADRIANUS, HUNSCHE STEFAN, JIANG AIQIN, RAGHUNATHAN SUDHARSHANAN, TIMOSHKOV VADIM YOURIEVICH, VAN LARE MARIE CLAIRE, SLACHTER ABRAHAM
Year of Publication 20.09.2022
Get full text
Year of Publication 20.09.2022
Patent
재료의 패터닝된 층을 형성하기 위한 방법 및 장치
OVERKAMP JIM VINCENT, DOLGOV ALEXANDR, WUISTER SANDER FREDERIK, VORONINA VICTORIA, POLYAKOV ALEXEY OLEGOVICH, DRUZHININA TAMARA, VAN LARE MARIE CLAIRE, VAN KAMPEN MAARTEN, DE JAGER PIETER WILLEM HERMAN, KURGANOVA EVGENIA, KASTRUP BERNARDO, MAAS RUBEN CORNELIS
Year of Publication 14.10.2020
Get full text
Year of Publication 14.10.2020
Patent