PROCESS WINDOW BASED ON DEFECT PROBABILITY
TEL WIM T, VAN INGEN SCHENAU KOENRAAD, HUNSCHE STEFAN, RISPENS GIJSBERT, PETERSON BRENNAN, VAN OOSTEN ANTON B, SLACHTER ABRAHAM
Year of Publication 07.08.2020
Get full text
Year of Publication 07.08.2020
Patent
Process window based on defect probability
RISPENS, GIJSBERT, SLACHTER, ABRAHAM, PETERSON, BRENNAN, HUNSCHE, STEFAN, TEL, WIM TJIBBO, VAN INGEN SCHENAU, KOENRAAD, VAN OOSTEN, ANTON BERNHARD
Year of Publication 21.05.2020
Get full text
Year of Publication 21.05.2020
Patent
Method for calibrating simulation process based on defect-based process window
TIMOSHKOV, VADIM YOURIEVICH, COLINA, LUIS ALBERTO COLINA SANTAMARIA, SLACHTER, ABRAHAM, DILLEN, HERMANUS ADRIANUS, KOOIMAN, MARLEEN, JIANG, AIQIN, RAGHUNATHAN, SUDHARSHANAN, VAN LARE, MARIE-CLAIRE, HUNSCHE, STEFAN, VAN INGEN SCHENAU, KOENRAAD, WANG, FU-MING
Year of Publication 16.12.2021
Get full text
Year of Publication 16.12.2021
Patent
Process window based on defect probability
RISPENS, GIJSBERT, SLACHTER, ABRAHAM, PETERSON, BRENNAN, HUNSCHE, STEFAN, TEL, WIM TJIBBO, VAN INGEN SCHENAU, KOENRAAD, VAN OOSTEN, ANTON BERNHARD
Year of Publication 16.09.2019
Get full text
Year of Publication 16.09.2019
Patent
METHOD OF DETERMINING CONTROL PARAMETERS OF A DEVICE MANUFACTURING PROCESS
VAN INGEN SCHENAU KOENRAAD, ANUNCIADO ROY, STAALS FRANK, WARNAAR PATRICK, VAN GORP SIMON, JOSEN MARINUS, TEL WIM, MASLOW MARK, SLACHTER ABRAHAM
Year of Publication 12.05.2020
Get full text
Year of Publication 12.05.2020
Patent
A method in the manufacturing process of a device, a non-transitory computer-readable medium and a system configured to perform the method
WARNAAR, PATRICK, VAN GORP, SIMON HENDRIK CELINE, ANUNCIADO, ROY, STAALS, FRANK, MASLOW, MARK JOHN, SLACHTER, ABRAHAM, JOSEN, MARINUS, TEL, WIM TJIBBO, VAN INGEN SCHENAU, KOENRAAD
Year of Publication 16.06.2019
Get full text
Year of Publication 16.06.2019
Patent