Poly-SiGe-Based MEMS Thin-Film Encapsulation
Bin Guo, Bo Wang, Lianggong Wen, Helin, P., Claes, G., De Coster, J., Du Bois, Bert, Verbist, A., Van Hoof, R., Vereecke, G., Haspeslagh, L., Tilmans, H. A. C., Decoutere, S., Osman, H., Puers, R., De Wolf, I., Tanaka, S., Severi, S., Witvrouw, A.
Published in Journal of microelectromechanical systems (01.02.2012)
Published in Journal of microelectromechanical systems (01.02.2012)
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Journal Article
High density interconnect substrates using multilayer thin film technology on laminate substrates (MCM-SL D)
Beyne, Eric, Van Hoof, Rita, Webers, Tomas, Brebels, Steven, Rossi, Stéphanie, Lechleiter, François, Di Ianni, Marianna, Ostmann, Andreas
Published in Microelectronics international (01.12.2001)
Published in Microelectronics international (01.12.2001)
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Journal Article
Post processing of a SiNy-based photonic stack above a CMOS imager sensor
Pham, Nga. P., Tyagi, Hemant K., Bois, Bert Du, Hoof, Rita Van, Winderickx, Gillis
Published in 2018 IEEE 20th Electronics Packaging Technology Conference (EPTC) (01.12.2018)
Published in 2018 IEEE 20th Electronics Packaging Technology Conference (EPTC) (01.12.2018)
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Conference Proceeding
SiGe MEMS at processing temperatures below 250°C
El-Rifai, Joumana, Sedky, Sherif, Van Hoof, Rita, Severi, Simone, Lin, Dennis, Sangameswaran, Sandeep, Puers, Robert, Van Hoof, Chris, Witvrouw, Ann
Published in Sensors and actuators. A. Physical. (01.12.2012)
Published in Sensors and actuators. A. Physical. (01.12.2012)
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Journal Article
Improvement of PECVD Silicon–Germanium Crystallization for CMOS Compatible MEMS Applications
Guo, Bin, Severi, Simone, Bryce, George, Claes, Gert, Van Hoof, Rita, Du Bois, Bert, Haspeslagh, Luc, Witvrouw, Ann, Decoutere, Stefaan
Published in Journal of the Electrochemical Society (2010)
Published in Journal of the Electrochemical Society (2010)
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Journal Article
SiGe MEMS at processing temperatures below 250 degree C
El-Rifai, Joumana, Sedky, Sherif, Van Hoof, Rita, Severi, Simone, Lin, Dennis, Sangameswaran, Sandeep, Puers, Robert, Van Hoof, Chris, Witvrouw, Ann
Published in Sensors and actuators. A. Physical. (01.12.2012)
Published in Sensors and actuators. A. Physical. (01.12.2012)
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Journal Article
Apparent and steady-state etch rates in thin film etching and under-etching of microstructures: II. Characterization
Van Barel, Gregory, Du Bois, Bert, Van Hoof, Rita, De Wachter, Jef, De Ceuninck, Ward, Witvrouw, Ann
Published in Journal of micromechanics and microengineering (01.05.2010)
Published in Journal of micromechanics and microengineering (01.05.2010)
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Journal Article
Development, Optimization and Evaluation of a CF 4 Pretreatment Process to Remove Unwanted Interfacial Layers in Stacks of CVD and PECVD Polycrystalline Silicon-Germanium for MEMS Applications
Bryce, George, Severi, Simone, Van Hoof, Rita, Guo, Bin, Kunnen, Eddy, Witvrouw, Ann, Decoutere, Stefaan
Published in ECS transactions (08.10.2010)
Published in ECS transactions (08.10.2010)
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Journal Article
Simultaneous Optimization of the Material Properties, Uniformity and Deposition Rate of Polycrystalline CVD and PECVD Silicon-Germanium Layers for MEMS Applications
Bryce, George, Severi, Simone, Du Bois, Bert, Willegems, Myriam, Claes, Gert, Van Hoof, Rita, Haspeslagh, Luc, Decoutere, Stefaan, Witvrouw, Ann
Published in ECS transactions (2009)
Published in ECS transactions (2009)
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Journal Article
Wafer Level Characterization of the Sacrificial HDP Oxide Lateral Etching by Anhydrous Vapor HF with Ethanol Vapor for SiGe MEMS Structures
Cui, Hushan, Van Hoof, Rita, Severi, Simone, Witvrouw, Ann, Knoops, An, Delande, Tinne, Pancken, Joris, Claes, Martine
Published in ECS transactions (01.01.2010)
Published in ECS transactions (01.01.2010)
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Journal Article
(Invited) SiGe MEMS Technology: A Platform Technology Enabling Different Demonstrators
Witvrouw, Ann, Van Hoof, Rita, Bryce, George, Du Bois, Bert, Verbist, Agnes, Severi, Simone, Haspeslagh, Luc, Osman, Haris, De Coster, Jeroen, Wen, Lianggong, Puers, Robert, Beernaert, Roel, De Smet, Herbert, Rudra, Sukumar, Van Thourhout, Dries
Published in ECS transactions (01.01.2010)
Published in ECS transactions (01.01.2010)
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Journal Article
Monolithic integration of photonic stack onto CMOS imager for absorption spectroscopy
Malak, Maurine, Claes, Tom, Garcia-Munoz, Victor, Tyagi, Hemant Kumar, Van Hoof, Rita, Winderickx, Gillis, Severi, Simone, Lee, Woochang, Kim, Dongho, Ahn, Sungmo, Van Dorpe, Pol, Rottenberg, Xavier, Peumans, Peter, Tilmans, Harrie A.C.
Published in 2018 IEEE Micro Electro Mechanical Systems (MEMS) (01.01.2018)
Published in 2018 IEEE Micro Electro Mechanical Systems (MEMS) (01.01.2018)
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Conference Proceeding
Thermal modeling and management in ultrathin chip stack technology
Pinel, S., Marty, A., Tasselli, J., Bailbe, J.-P., Beyne, E., Van Hoof, R., Marco, S., Morante, J.R., Vendier, O., Huan, M.
Published in IEEE transactions on components and packaging technologies (01.06.2002)
Published in IEEE transactions on components and packaging technologies (01.06.2002)
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Journal Article
Ultra-Narrow, High Aspect Ratio Trenches for Use in Miniaturized Poly-Sige Accelerometers
Ray Chaudhuri, Ashesh, Helin, Philippe, Severi, Simone, Hoof, Rita Van, Du Bois, Bert, Tilmans, Harrie, Francis, Laurent, Witvrouw, Ann
Published in Meeting abstracts (Electrochemical Society) (27.10.2013)
Published in Meeting abstracts (Electrochemical Society) (27.10.2013)
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Journal Article
High density interconnect substrates using multilayer thin film technology on laminate substrates MCMSLD
Beyne, Eric, Van Hoof, Rita, Webers, Tomas, Brebels, Steven, Rossi, Stphanie, Lechleiter, Franois, Di Ianni, Marianna, Ostmann, Andreas
Published in Microelectronics international (01.12.2001)
Published in Microelectronics international (01.12.2001)
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Journal Article