Search Results - "VAN GREEVENBROEK HENDRIKUS ROBERTUS MARIE" :: K.UTB vyhledávací portál | TBU Library Retrieval Portal

Lithographic Apparatus and a Method for Determining a Polarization Property

Lithographic Apparatus and a Method for Determining a Polarization Property

by KLAASSEN MICHEL FRANSOIS HUBERT, VAN DE KERKHOF MARCUS ADRIANUS, ROOIJAKKERS WILHELMUS JACOBUS MARIA, UITTERDIJK TAMMO, DE BOEIJ WILHELMUS PETRUS, KOK HAICO VICTOR, VAN GREEVENBROEK HENDRIKUS ROBERTUS MARIE, WEHRENS MARTIJN GERARD DOMINIQUE
Year of Publication 11.07.2013

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Patent

Kit of parts for assembling an optical element, method of assembling an optical element, optical element, lithographic apparatus, and device manufacturing method

Kit of parts for assembling an optical element, method of assembling an optical element, optical element, lithographic apparatus, and device manufacturing method

by MULDER HEINE MELLE, VAN GREEVENBROEK HENDRIKUS ROBERTUS MARIE
Year of Publication 02.05.2006

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Kit of parts for assembling an optical element, method of assembling an optical element, optical element, lithographic apparatus, and device manufacturing method

Kit of parts for assembling an optical element, method of assembling an optical element, optical element, lithographic apparatus, and device manufacturing method

by Mulder, Heine Melle, Van Greevenbroek, Hendrikus Robertus Marie
Year of Publication 02.05.2006

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Patent

Method for generating radiation, lithographic method, radiation source, lithographic projection apparatus, and method for generating a fuel droplet stream

Method for generating radiation, lithographic method, radiation source, lithographic projection apparatus, and method for generating a fuel droplet stream

by DIJKSMAN, JOHAN FREDERIK, BANINE, VADIM YEVGENYEVICH, WINKELS, KOEN GERHARDUS, VAN GREEVENBROEK, HENDRIKUS ROBERTUS MARIE, BADIE, RAMIN, YAKUNIN, ANDREI MIKHAILOVICH, KEMPEN, ANTONIUS THEODORUS WILHELMUS
Year of Publication 11.10.2017

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LITHOGRAPHIC APPARATUS AND METHOD FOR MANUFACTURING DEVICE

LITHOGRAPHIC APPARATUS AND METHOD FOR MANUFACTURING DEVICE

by MICHEL FRANSOIS HUBERT KLAASSEN, MULDER HEINE MELLE, VAN GREEVENBROEK HENDRIKUS ROBERTUS MARIE, GREIJDANUS ERIK MARTIJN
Year of Publication 20.11.2008

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Patent

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

by KLAASSEN MICHEL FRANSOIS HUBERT, MULDER HEINE MELLE, VAN GREEVENBROEK HENDRIKUS ROBERTUS MARIE, GREIJDANUS ERIK MARTIJN
Year of Publication 23.10.2008

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Patent

ILLUMINATING DEVICE FOR LITHOGRAPHY APPARATUS AND METHOD

ILLUMINATING DEVICE FOR LITHOGRAPHY APPARATUS AND METHOD

by MICHEL FRANSOIS HUBERT KLAASSEN, GEH BERND PETER, SCHMITT-WEAVER EMIL PETER, VAN GREEVENBROEK HENDRIKUS ROBERTUS MARIE
Year of Publication 02.10.2008

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Patent

ILLUMINATOR FOR A LITHOGRAPHIC APPARATUS AND METHOD

ILLUMINATOR FOR A LITHOGRAPHIC APPARATUS AND METHOD

by KLAASSEN MICHEL FRANSOIS HUBERT, GEH BERND PETER, SCHMITT WEAVER EMIL PETER, VAN GREEVENBROEK HENDRIKUS ROBERTUS MARIE
Year of Publication 19.09.2008

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Patent

Illuminator for a lithographic apparatus and method

Illuminator for a lithographic apparatus and method

by KLAASSEN MICHEL FRANSOIS HUBERT, MARIE VAN GREEVENBROEK HENDRIKUS ROBERTUS, GEH BERND, SCHMITT-WEAVER EMIL PETER
Year of Publication 18.09.2008

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Patent

Kit of parts for assembling an optical element, method of assembling an optical element, optical element, lithographic apparatus, and device manufacturing method

Kit of parts for assembling an optical element, method of assembling an optical element, optical element, lithographic apparatus, and device manufacturing method

by MULDER, HEINE MELLE, VAN GREEVENBROEK, HENDRIKUS ROBERTUS MARIE
Year of Publication 21.05.2005

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Patent

Illuminator for a lithographic apparatus and method

Illuminator for a lithographic apparatus and method

by GEH, BERND PETER, KLAASSEN, MICHEL FRANSOIS HUBERT, VAN GREEVENBROEK, HENDRIKUS ROBERTUS MARIE, SCHMITT-WEAVER, EMIL PETER
Year of Publication 21.03.2015

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Patent

KIT OF PARTS FOR ASSEMBLING AN OPTICAL ELEMENT, METHOD OF ASSEMBLING AN OPTICAL ELEMENT, OPTICAL ELEMENT, LITHOGRAPHIC APPARATUS, AND DEVICE MANUFACTURING METHOD

KIT OF PARTS FOR ASSEMBLING AN OPTICAL ELEMENT, METHOD OF ASSEMBLING AN OPTICAL ELEMENT, OPTICAL ELEMENT, LITHOGRAPHIC APPARATUS, AND DEVICE MANUFACTURING METHOD

by MULDER, HEINE, MELLE, VAN GREEVENBROEK, HENDRIKUS, ROBERTUS, MARIE
Year of Publication 28.01.2005

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Patent

LITHOGRAPHIC APPARATUS AND METHOD OF ILLUMINATION UNIFORMITY CORRECTION AND UNIFORMITY DRIFT COMPENSATION

LITHOGRAPHIC APPARATUS AND METHOD OF ILLUMINATION UNIFORMITY CORRECTION AND UNIFORMITY DRIFT COMPENSATION

by ZIMMERMAN RICHARD CARL, KOCHERSPERGER PETER C, CSISZAR SZILARD ISTVAN, STONE ELIZABETH, VLADIMIRSKY OLGA, VAN GREEVENBROEK HENDRIKUS ROBERTUS MARIE, KUBICK FREDERICK, DOWNEY TODD R
Year of Publication 09.12.2010

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Lithographic Apparatus and Method for Illumination Uniformity Correction and Uniformity Drift Compensation

Lithographic Apparatus and Method for Illumination Uniformity Correction and Uniformity Drift Compensation

by ZIMMERMAN RICHARD CARL, KOCHERSPERGER PETER C, CSISZAR SZILARD ISTVAN, STONE ELIZABETH, VLADIMIRSKY OLGA, VAN GREEVENBROEK HENDRIKUS ROBERTUS MARIE, KUBICK FREDERICK, DOWNEY TODD R
Year of Publication 02.12.2010

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KIT OF OPTICAL ELEMENT ASSEMBLING PART, METHOD OF ASSEMBLING OPTICAL ELEMENT, OPTICAL ELEMENT, LITHOGRAPHIC APPARATUS, AND MANUFACTURING METHOD OF DEVICE

KIT OF OPTICAL ELEMENT ASSEMBLING PART, METHOD OF ASSEMBLING OPTICAL ELEMENT, OPTICAL ELEMENT, LITHOGRAPHIC APPARATUS, AND MANUFACTURING METHOD OF DEVICE

by MULDER HEINE MELLE, VAN GREEVENBROEK HENDRIKUS ROBERTUS MARIE
Year of Publication 18.03.2004

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Patent

Kit of parts for assembling an optical element, method of assembling an optical element, optical element, lithographic apparatus, and device manufacturing method

Kit of parts for assembling an optical element, method of assembling an optical element, optical element, lithographic apparatus, and device manufacturing method

by MULDER HEINE MELLE, VAN GREEVENBROEK HENDRIKUS ROBERTUS MARIE
Year of Publication 22.01.2004

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Patent

Lithographic apparatus

Lithographic apparatus

by MULDER, HEINE MELLE, VAN GREEVENBROEK, HENDRIKUS ROBERTUS MARIE
Year of Publication 03.12.2003

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Patent

Lithographic apparatus and method

Lithographic apparatus and method

by VERWEIJ, ANTONIE HENDRIK, EURLINGS, MARKUS FRANCISCUS ANTONIUS, DIERICHS, MARCEL MATHIJS THEODORE MARIE, VAN GREEVENBROEK, HENDRIKUS ROBERTUS MARIE
Year of Publication 01.07.2015

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Patent

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

by Dierichs, Marcel Mathijs Theodore Marie, Van Der Laan, Hans, Van Greevenbroek, Hendrikus Robertus Marie
Year of Publication 30.01.2007

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Patent

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

by DIERICHS MARCEL MATHIJS THEODORE MARIE, VAN DER LAAN HANS, VAN GREEVENBROEK HENDRIKUS ROBERTUS MARIE
Year of Publication 30.01.2007

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