INSPECTION METHOD, LITHOGRAPHIC APPARATUS, MASK AND SUBSTRATE
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Year of Publication 06.09.2018
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INSPECTION METHOD LITHOGRAPHIC APPARATUS MASK AND SUBSTRATE
VAN DOMMELEN YOURI JOHANNES LAURENTIUS MARIA, KESSELS LAMBERTUS GERARDUS MARIA, PIETERS MARCO JOHANNES ANNEMARIE, DEN BOEF ARIE JEFFREY, HINNEN PAUL CHRISTIAAN, ENGBLOM PETER DAVID, BHATTACHARYYA KAUSTUVE
Year of Publication 11.06.2018
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Year of Publication 11.06.2018
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INSPECTION METHOD, LITHOGRAPHIC APPARATUS, MASK AND SUBSTRATE
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Year of Publication 17.08.2016
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Year of Publication 17.08.2016
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LENS HEATING AWARE SOURCE MASK OPTIMIZATION FOR ADVANCED LITHOGRAPHY
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Year of Publication 20.08.2013
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Year of Publication 29.06.2011
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Year of Publication 17.06.2010
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Year of Publication 17.06.2010
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Year of Publication 13.12.2022
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Year of Publication 13.12.2022
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Method and apparatus for angular-resolved spectroscopic lithography characterization
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Year of Publication 23.03.2021
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Year of Publication 27.08.2019
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Year of Publication 27.08.2019
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Lens heating aware source mask optimization for advanced lithography
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Year of Publication 10.04.2018
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INSPECTION METHOD, LITHOGRAPHIC APPARATUS, MASK AND SUBSTRATE
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Year of Publication 06.09.2018
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Inspection method, lithographic apparatus, mask and substrate
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Year of Publication 19.06.2018
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Year of Publication 19.06.2018
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Method and apparatus for angular-resolved spectroscopic lithography characterization
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Year of Publication 26.03.2019
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Year of Publication 26.03.2019
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Year of Publication 08.01.2019
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Year of Publication 08.01.2019
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INSPECTION METHOD, LITHOGRAPHIC APPARATUS, MASK AND SUBSTRATE
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Year of Publication 27.10.2016
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Year of Publication 27.10.2016
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Lens heating aware source mask optimization for advanced lithography
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Year of Publication 01.07.2015
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INSPECTION METHOD, LITHOGRAPHIC APPARATUS, MASK AND SUBSTRATE
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Year of Publication 25.06.2015
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Lithographic apparatus, reflective member and a method of irradiating the underside of a liquid supply system
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Year of Publication 28.04.2015
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Year of Publication 11.12.2012
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Year of Publication 11.12.2012
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Year of Publication 11.12.2012
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Year of Publication 11.12.2012
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