Radiation source apparatus, lithographic apparatus, method of generating and delivering radiation and method for manufacturing a device
LOOPSTRA ERIK ROELOF, SCACCABAROZZI LUIGI, NEERHOF HENDRIK ANTONY JOHANNES, BANINE VADIM YEVGENYEVICH, VAN DIJK ADRIANUS JOHANNES MARIA, STEINHOFF JENS ARNO, BRULS RICHARD JOSEPH, YAKUNIN ANDREI MIKHAILOVICH
Year of Publication 29.03.2016
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Year of Publication 29.03.2016
Patent
RADIATION SOURCE APPARATUS, LITHOGRAPHIC APPARATUS, METHOD OF GENERATING AND DELIVERING RADIATION AND METHOD FOR MANUFACTURING DEVICE
LOOPSTRA ERIK ROELOF, SCACCABAROZZI LUIGI, BANINE VADIM YEVGENYEVICH, VAN DIJK ADRIANUS JOHANNES MARIA, STEINHOFF JENS ARNO, BRULS RICHARD JOSEPH, HENDRIK ANTONY JOHANNES NEERHOF, YAKUNIN ANDREY MIKHAILOVICH
Year of Publication 29.09.2011
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Year of Publication 29.09.2011
Patent
RADIATION SOURCE APPARATUS, LITHOGRAPHIC APPARATUS, METHOD OF GENERATING AND DELIVERING RADIATION AND METHOD FOR MANUFACTURING A DEVICE
LOOPSTRA ERIK ROELOF, SCACCABAROZZI LUIGI, NEERHOF HENDRIK ANTONY JOHANNES, BANINE VADIM YEVGENYEVICH, VAN DIJK ADRIANUS JOHANNES MARIA, STEINHOFF JENS ARNO, BRULS RICHARD JOSEPH, YAKUNIN ANDREI MIKHAILOVICH
Year of Publication 15.09.2011
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Year of Publication 15.09.2011
Patent